An Optomechatronics Inspection Technique of TFT Array Flaw Applied to Medical Display

Wang, Yao Chin; Lin, Bor-Shyh

doi:10.1109/tmech.2014.2306439

Cited by 5 publications

(3 citation statements)

References 12 publications

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“…A TFT inspection system has been widely used for providing flaw detection capability with in situ process checking. (4) With cost reduction and increasing yield in advanced ultrahigh-resolution display panels, flaw detection is becoming a high priority for manufacturers of displays for small-pixel-sized applications. (5) Over the past years, a number of technologies have been developed and applied for the inspection of defects on TFT arrays, (6)(7)(8)(9)(10)(11) but Liu did not mention how to detect flaw pixels with TFT characterization.…”

Section: Introductionmentioning

confidence: 99%

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Optoelectronics Inspection of Amorphous In–Ga–Zn–O-based Active-matrix Thin-film Transistor Array for Foldable Substrate Applications

Lin¹,

Siu²,

Wang³

et al. 2022

Sensors and Materials

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In this study, we report the flaw detection properties of amorphous In-Ga-Zn-O (IGZO)based active-matrix thin-film transistors (TFTs) on foldable device applications. Thinned-glass and foldable substrates are two different types of critical flexible substrate for defect inspection, which are also difficult to check by traditional in situ inspection techniques for mass production. The technique we proposed is based on the noninvasive optoelectronic transforming principle to inspect flaw pixels, with the advantages of an ultrahigh resolution, a small pixel array, and no contact damage. This method can be applied to foldable substrates with an ultrahigh-definition (UHD) TFT array panel and digital X-ray detectors. The experimental data showed good flaw detection rate (>90.1%) and fail detection rate (<4.9%).

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Section: Introductionmentioning

confidence: 99%

“…We showed that the proposed technique was for detecting flaws on advanced medical display panels (4) because of the above issues. The technique was used for detection by optoelectrical conversion with TFT characterization.…”

Section: Introductionmentioning

confidence: 99%

Optoelectronics Inspection of Amorphous In–Ga–Zn–O-based Active-matrix Thin-film Transistor Array for Foldable Substrate Applications

Lin¹,

Siu²,

Wang³

et al. 2022

Sensors and Materials

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“…Several schemes have been designed for backplane testing. Commonly used noncontact schemes are voltage imaging [14], [15], [16], optical charge sensing [17] and electron beam testing [18]. The common contact based techniques are charge feedthrough readout [19], transfer admittance technique [20] and the modified built in driver technique [11].…”

Section: Introductionmentioning

confidence: 99%

Test System for Thin Film Transistor Parameter Extraction in Active Matrix Backplanes

Daniel

Nair

Sambandan

2019

IEEE J. Electron Devices Soc.

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Thin film transistor (TFT) active matrix backplanes are used in large area electronic systems, such as displays and image sensors. With backplanes being fabricated on wearable and flexible substrates, the possibilities of operational faults in backplanes have increased. These faults could either be hard faults, such as line opens or shorts or could be softer faults, such as time dependent variations in the TFT transfer characteristics. Real time diagnosis of these faults require built-in-self-test systems. While many such systems have been demonstrated to diagnose hard faults, an easily realizable system to identify soft faults, such as variations in transistor transconductance remain an open challenge. In this paper, we discuss a system that extracts the transconductance by charging and then discharging the pixel capacitor at various gate voltages for an active matrix liquid crystal display backplane. This permits a plot of the time averaged current versus the gate voltage from which the spatial variation of transconductance can be extracted. The details of the design are discussed and a proof of concept with a 3 × 4 amorphous silicon backplane is demonstrated.

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Electro-optical measurement and process inspection for integrated gate driver circuit on thin-film-transistor array panels

2015

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An Optomechatronics Inspection Technique of TFT Array Flaw Applied to Medical Display

Cited by 5 publications

References 12 publications

Optoelectronics Inspection of Amorphous In–Ga–Zn–O-based Active-matrix Thin-film Transistor Array for Foldable Substrate Applications

Optoelectronics Inspection of Amorphous In–Ga–Zn–O-based Active-matrix Thin-film Transistor Array for Foldable Substrate Applications

Test System for Thin Film Transistor Parameter Extraction in Active Matrix Backplanes

Electro-optical measurement and process inspection for integrated gate driver circuit on thin-film-transistor array panels

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