An optical MEMS pressure sensor based on a phase demodulation method

Ge, Yixian; Wang, Ming; Chen, Xuxing; Hua, Rong

doi:10.1016/j.sna.2007.10.086

Cited by 24 publications

(16 citation statements)

References 6 publications

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“…Numerous approaches have been taken: the older ones being quadrature based methods [21] and the use of two interrogating wavelengths [22], and the newer ones being Fourier based methods [23] and low-coherence (white light) interferometry [24]. An exciting new alternative to Fabry-Perot based MEMS is the possibility of interrogation using microring resonators [25].…”

Section: New Trends In Interrogationmentioning

confidence: 99%

Advanced materials and techniques for fibre-optic sensing

Henderson

2014

IOP Conf. Ser.: Mater. Sci. Eng.

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Abstract. Fibre-optic monitoring systems came of age in about 1999 upon the emergence of the world's first significant commercialising company -a spin-out from the UK's collaborative MAST project. By using embedded fibre-optic technology, the MAST project successfully measured transient strain within high-performance composite yacht masts. Since then, applications have extended from smart composites into civil engineering, energy, military, aerospace, medicine and other sectors. Fibre-optic sensors come in various forms, and may be subject to embedment, retrofitting, and remote interrogation. The unique challenges presented by each implementation require careful scrutiny before widespread adoption can take place. Accordingly, various aspects of design and reliability are discussed spanning a range of representative technologies that include resonant microsilicon structures, MEMS, Bragg gratings, advanced forms of spectroscopy, and modern trends in nanotechnology.

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Section: New Trends In Interrogationmentioning

confidence: 99%

Advanced materials and techniques for fibre-optic sensing

Henderson

2014

IOP Conf. Ser.: Mater. Sci. Eng.

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“…2. The refractive index of the material is n. Assuming normal incidence, Fresnel reflection coefficient, r, is given by [9,12]: E q . 1 where n1 and n2 are the refractive indices of the two media forming the boundary.…”

Section: A Design Of Ideal Fabry-perot Pressure Sensormentioning

confidence: 99%

“…The diaphragm thickness should be such that it does not deflect more than λo/4 at maximum designed pressure which implies that cavity depth [9,12]:…”

Section: A Diaphragm Thickness Calculationmentioning

confidence: 99%

“…The deflection of the diaphragm due to the application of pressure, P is given by [4][5][6][7][8][9][10][11][12] E q . 5 Where r: distance from the centre of the diaphragm plate w(r): deflection at r , wo: deflection at r=0 P : normal pressure, a : radius of the cavity; h: diaphragm thickness, μ : Poisson's ratio of diaphragm E: Young's modulus of diaphragm…”

Section: A Diaphragm Thickness Calculationmentioning

confidence: 99%

“…Free spectral range is the working range where there are no overlapping orders and for FPI illuminated with LED having centre wavelength λo is expressed as [3,9,12]:…”

Section: A Diaphragm Thickness Calculationmentioning

confidence: 99%

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A New Diaphragm Material for Optical Fibre Fabry-Perot Pressure Sensor

Said

Radzi

Noh

et al. 2009

2009 Fifth International Conference on MEMS NANO, and Smart Systems

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Fibre optic Fabry-Perot interferometric pressure sensors have proved many orders of excellent measurements system, but they suffer from limitations in sensitivity and resolution caused by the trade-off in designing the sensor when very thin diaphragm is needed. By reducing the diaphragm thickness increases the deflection range, but reduces the diaphragm strength and therefore increases the risk of mechanical failure. The pressure sensor has been designed and its fabrication process using MEMS techniques is explained. This paper proposes a new diaphragm material for the fibre optic Fabry-Perot pressure sensor. Using a Polydimethylsiloxane (PDMS), the limitation on sensor resolution and sensitivity are overcome. The goal of this research is to design and analyze the PDMS diaphragm to enhance the consistency and sustainability of fibre optic FabryPerot pressure sensor for medical measurements which require a minimum resolution of ~1 mmHg over all the physiological pressure range (~300 mmHg) [1,2]. Comparisons of theoretical and simulation with Coventor Ware simulator on mechanical part of the pressure sensor are made. Also, an explanation viewing the sensor's diaphragm stability is provided.

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