An optical fibre MEMS pressure sensor using dual-wavelength interrogation

Ni, Xiaoqi; Wang, Ming; Chen, Xuxing; Ge, Yixian; Hua, Rong

doi:10.1088/0957-0233/17/9/005

Cited by 11 publications

(3 citation statements)

References 7 publications

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“…The sensor is demodulated by detecting the shift of the reflected or transmitted spectrum or change in intensity of the light spectrum which both results from changes in optical path length [10,11]. The diffused components of the reflected light will strike a diaphragm which is in contact with the skin on a superficial artery.…”

Section: Methodsmentioning

confidence: 99%

Modeling of a micro-diaphragm biosensor for human artery pulse wave detection

Hasikin‬

Ibrahim

Soin

2008

2008 IEEE International Conference on Semiconductor Electronics

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The analysis of the behavior of the micro-diaphragm biosensor for human artery pulse wave detection has been presented in this paper. This includes the study of the effect of the diaphragm structural parameters on the static and dynamic performances such as sensitivity and natural frequency. It can be concluded that the modeled micro-diaphragm with a radius of 175J1m and thickness of 4J1m respectively has satisfied the maximum allowable deflection and operates in optimum frequency response.

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Section: Methodsmentioning

confidence: 99%

Modeling of a micro-diaphragm biosensor for human artery pulse wave detection

Hasikin‬

Ibrahim

Soin

2008

2008 IEEE International Conference on Semiconductor Electronics

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“…Fibre optic sensors can be classified in three forms that include: fibre Bragg grating (FBG), reflectometry optic sensors (optic time domain reflectometry and optic frequency domain reflectometry) and interferometry (Fabry-Perot (FP) or Mach Zehnder). Due to difficulty of integration and fabrication, most MEMS-based optical sensors are designed based on a FP interferometry principle [51,[53][54][55][56][57]. However, some trials have been conducted to fabricate MEMS sensor based on Mach Zehnder interferometry [58,59].…”

Section: Opticalmentioning

confidence: 99%

MEMS technology and applications in geotechnical monitoring: a review

Barzegar

Blanks²,

Sainsbury

et al. 2022

Meas. Sci. Technol.

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In-situ monitoring is an important aspect of geotechnical projects to ensure safety and optimise design measures. However, existing conventional monitoring instruments are limited in their accuracy, durability, complex and high cost of installation and requirement for ongoing real time measurement. Advancements in sensing technology in recent years have created a unique prospect for geotechnical monitoring to overcome some of those limitations. For this reason, micro-electro-mechanical system (MEMS) technology has gained popularity for geotechnical monitoring. MEMS devices combine both mechanical and electrical components to convert environment system stimuli to electrical signals. MEMS-based sensors provide advantages to traditional sensors in that they are millimetre to micron sized and sufficiently inexpensive to be ubiquitously distributed within an environment or structure. This ensures that the monitoring of the in-situ system goes beyond discrete point data but provides an accurate assessment of the entire structures response. The capability to operate with wireless technology makes MEMS microsensors even more desirable in geotechnical monitoring where dynamic changes in heterogeneous materials at great depth and over large areas are expected. Many of these locations are remote or hazardous to access directly and are thus a target for MEMS development. This paper provides a review of current applications of existing MEMS technology to the field/s of geotechnical engineering and provides a path forward for the expansion of this research and commercialisation of products.

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“…Numerous approaches have been taken: the older ones being quadrature based methods [21] and the use of two interrogating wavelengths [22], and the newer ones being Fourier based methods [23] and low-coherence (white light) interferometry [24]. An exciting new alternative to Fabry-Perot based MEMS is the possibility of interrogation using microring resonators [25].…”

Section: New Trends In Interrogationmentioning

confidence: 99%

Advanced materials and techniques for fibre-optic sensing

Henderson

2014

IOP Conf. Ser.: Mater. Sci. Eng.

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Abstract. Fibre-optic monitoring systems came of age in about 1999 upon the emergence of the world's first significant commercialising company -a spin-out from the UK's collaborative MAST project. By using embedded fibre-optic technology, the MAST project successfully measured transient strain within high-performance composite yacht masts. Since then, applications have extended from smart composites into civil engineering, energy, military, aerospace, medicine and other sectors. Fibre-optic sensors come in various forms, and may be subject to embedment, retrofitting, and remote interrogation. The unique challenges presented by each implementation require careful scrutiny before widespread adoption can take place. Accordingly, various aspects of design and reliability are discussed spanning a range of representative technologies that include resonant microsilicon structures, MEMS, Bragg gratings, advanced forms of spectroscopy, and modern trends in nanotechnology.

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An optical fibre MEMS pressure sensor using dual-wavelength interrogation

Cited by 11 publications

References 7 publications

Modeling of a micro-diaphragm biosensor for human artery pulse wave detection

Modeling of a micro-diaphragm biosensor for human artery pulse wave detection

MEMS technology and applications in geotechnical monitoring: a review

Advanced materials and techniques for fibre-optic sensing

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