2023
DOI: 10.3390/nano13142077
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An Optical 1×4 Power Splitter Based on Silicon–Nitride MMI Using Strip Waveguide Structures

Aviv Frishman,
Dror Malka

Abstract: This paper presents a new design for a 1 × 4 optical power splitter using multimode interference (MMI) coupler in silicon nitride (Si3N4) strip waveguide structures. The main functionality of the proposed design is to use Si3N4 for dealing with the back reflection (BR) effect that usually happens in silicon (Si) MMI devices due to the self-imaging effect and the higher index contrast between Si and silicon dioxide (SiO2). The optimal device parameters were determined through numerical optimizations using the b… Show more

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Cited by 12 publications
(4 citation statements)
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“…The grating period between the grooved teeth, denoted as Λ, has been set to 0.84 µm, where the SiO2 width of each grooved tooth is 0.34 µm, represented by W, and In our model, we selected the GC based on a uniformly grooved teeth configuration for its ease of fabrication and compact footprint, which leads to low-cost GC devices. It is important to emphasize that while complex configurations, such as using a reflector [35,36], a GC with non-uniform grooved teeth [37][38][39][40][41][42], or edge couplers [38], can improve coupling efficiency, they also introduce fabrication difficulties and increased costs. For example, the reflectors used in GCs are sensitive to fabrication variations, such as dimensional errors or imperfections in the grating structure.…”
Section: Grating Coupler Design and Theoretical Aspectsmentioning
confidence: 99%
“…The grating period between the grooved teeth, denoted as Λ, has been set to 0.84 µm, where the SiO2 width of each grooved tooth is 0.34 µm, represented by W, and In our model, we selected the GC based on a uniformly grooved teeth configuration for its ease of fabrication and compact footprint, which leads to low-cost GC devices. It is important to emphasize that while complex configurations, such as using a reflector [35,36], a GC with non-uniform grooved teeth [37][38][39][40][41][42], or edge couplers [38], can improve coupling efficiency, they also introduce fabrication difficulties and increased costs. For example, the reflectors used in GCs are sensitive to fabrication variations, such as dimensional errors or imperfections in the grating structure.…”
Section: Grating Coupler Design and Theoretical Aspectsmentioning
confidence: 99%
“…The multiplexer’s design is based on the principle of multimode interference (MMI), which allows for the uniform distribution of light from multiple input ports toward the output port via the self-imaging effect [ 11 , 12 , 13 ]. The design also takes advantage of silicon nitride (Si 3 N 4 ), a material with low propagation loss, high thermal stability [ 14 ], and compatibility with standard complementary metal-oxide-semiconductor (CMOS) manufacturing processes [ 15 , 16 ], making it an ideal material for integrated photonic applications.…”
Section: Introductionmentioning
confidence: 99%
“…Optical routers and multiplexers show high potential for transferring data between optical nodes with speeds matching the high-speed data transmission through optical fibers. Optical routers and splitters [3] based on integrated optical devices are usually based on photonic components such as multimode interferometers (MMIs) [4][5][6], Mach Zender interferometers [7,8], directional couplers [9,10], and ring resonators [11,12].…”
Section: Introductionmentioning
confidence: 99%