An Operation-Group Based Soft Scheduling Approach for Uncertain Semiconductor Wafer Fabrication System

Zhong, Huaxing; Liu, Min; Hao, Jinghua; Jiang, Sheng-Long

doi:10.1109/tsmc.2017.2669212

Cited by 9 publications

(4 citation statements)

References 37 publications

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“…Furthermore, Refs. [202,203] applied event-driven schedule repair methods. Qiao et al presented a partial repair rescheduling method, whose key is to detect a match-up point so that the segment of the original schedule to be repaired can be determined [202].…”

Section: Stochastic and Dynamic Schedulingmentioning

confidence: 99%

“…Qiao et al presented a partial repair rescheduling method, whose key is to detect a match-up point so that the segment of the original schedule to be repaired can be determined [202]. Zhong et al developed an operation-group-based soft scheduling approach, in which the critical scheduling decisions were preset offline while the remaining decisions were determined online during the execution of the initial soft schedule [203]. Zhong et al designed a job-priority-based soft scheduling approach to tackle stochastic job arrival and processing times in the oxidation/diffusion operation [204].…”

Section: Stochastic and Dynamic Schedulingmentioning

confidence: 99%

“…Most papers used deterministic periods, while [144] examined the RH method by limiting the number of runs for each machine, and [113] used a variable time interval-based RH strategy. In addition, few papers applied event-driven rescheduling methods, where rescheduling takes place only when unexpected events change system status [202][203][204].…”

Section: Stochastic/dynamic Scheduling Problemsmentioning

confidence: 99%

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Problems and Solution Methods of Machine Scheduling in Semiconductor Manufacturing Operations: A Survey

Fang,

Cheang,

Lim

2023

Sustainability

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Machine scheduling problems associated with semiconductor manufacturing operations (SMOs) are one of the major research topics in the scheduling literature. Lots of papers have dealt with different variants of SMOs’ scheduling problems, which are generally difficult to tackle theoretically and computationally. In this paper, the single machine, parallel machines, flow shops, and job shops scheduling problems from SMOs have been reviewed, based on different processing constraints, e.g., batch processing, auxiliary resources, incompatible job families, and reentrant flow, etc., with the cycle time, flow time, and throughput-related performance measures. Given the vast and diverse nature of the current literature, it is urgently needed to make a systematic survey in order to identify the important research problems, research trends, and the progress of the related solution methods, as well as clarify future research perspectives. We hope the findings and observations could provide some insights to the researchers and practitioners in this domain.

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Section: Stochastic and Dynamic Schedulingmentioning

confidence: 99%

Section: Stochastic and Dynamic Schedulingmentioning

confidence: 99%

Section: Stochastic/dynamic Scheduling Problemsmentioning

confidence: 99%

See 1 more Smart Citation

Problems and Solution Methods of Machine Scheduling in Semiconductor Manufacturing Operations: A Survey

Fang,

Cheang,

Lim

2023

Sustainability

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“…These policies include a sequence control policy that involves a set of advanced operation due dates and an input release control policy for realizing an adaptive constant WIP level. Nemoto et al [13] examined the financial benefits of CT reduction for developing a novel process using a stochastic simulation. The results demonstrated that even small decreases in CTs significantly influence the life cycle of a process.…”

Section: Introductionmentioning

confidence: 99%

Evaluation System and Correlation Analysis for Determining the Performance of a Semiconductor Manufacturing System

Zhao

et al. 2021

Complex Syst. Model. Simul.

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Numerous performance indicators exist for semiconductor manufacturing systems. Several studies have been conducted regarding the performance optimization of semiconductor manufacturing systems. However, because of the complex manufacturing processes, potential complementary or inhibitory correlations may exist among performance indicators, which are difficult to demonstrate specifically. To analyze the correlation between the performance indicators, this study proposes a performance evaluation system based on the mathematical significance of each performance indicator to design statistical schemes. Several samples can be obtained by conducting simulation experiments through the performance evaluation system. The Pearson correlation coefficient method and canonical correlation analysis are used on the received samples to analyze linear correlations between the performance indicators. Through the investigation, we found that linear and other complex correlations exist between the performance indicators. This finding can contribute to our future studies regarding performance optimization for the scheduling problems of semiconductor manufacturing.

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A self-organized approach for scheduling semiconductor manufacturing systems

Yang

Lin

et al. 2020

J Intell Manuf

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An Operation-Group Based Soft Scheduling Approach for Uncertain Semiconductor Wafer Fabrication System

Cited by 9 publications

References 37 publications

Problems and Solution Methods of Machine Scheduling in Semiconductor Manufacturing Operations: A Survey

Problems and Solution Methods of Machine Scheduling in Semiconductor Manufacturing Operations: A Survey

Evaluation System and Correlation Analysis for Determining the Performance of a Semiconductor Manufacturing System

A self-organized approach for scheduling semiconductor manufacturing systems

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