An Open Foundry Concept for Microsystem Small Series Production: Concept and Examples

Burghartz, Joachim N.; Harendt, Christine; Kueck, H.; Eberhardt, W. W.; Glosch, H.; Reinecke, Holger

doi:10.3850/978-981-07-0319-6_k005

Proceedings of the 8th International Conference on Multi-Material Micro Manufacture 2011

DOI: 10.3850/978-981-07-0319-6_k005

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An Open Foundry Concept for Microsystem Small Series Production: Concept and Examples

Joachim N. Burghartz¹,

Christine Harendt²,

H. Kueck³

et al.

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An Open Foundry Concept for Microsystem Small Series Production: Concept and Examples

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