2003
DOI: 10.1007/978-3-540-39869-1_14
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An Ontology for Production Control of Semiconductor Manufacturing Processes

Abstract: Abstract. In this paper, we describe an ontology for a hierarchically organized production control system in semiconductor manufacturing. The semiconductor manufacturing domain is characterized by reentrant product flows, sequence dependent setup-times, prescribed due-dates, a diverse product mix, a mix of different process types including batch processes and preventive maintenance issues because of complex technological processes. Starting from a hierarchical decomposition of the manufacturing system, we use … Show more

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Cited by 15 publications
(11 citation statements)
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“…Based on a data model of the semiconductor manufacturing domain, we derive the important concepts activity, resource, order, product, event, plan, and schedule (cf. [5] for a detailed description).…”
Section: Fabmas Ontologymentioning
confidence: 99%
See 1 more Smart Citation
“…Based on a data model of the semiconductor manufacturing domain, we derive the important concepts activity, resource, order, product, event, plan, and schedule (cf. [5] for a detailed description).…”
Section: Fabmas Ontologymentioning
confidence: 99%
“…FABMAS is a hierarchically organized multi-agent-system that is designed to allowing for production control of wafer fabs [2], [3]. The FABMAS ontology [5] was suggested to allow for a meaningful communication among the agents.…”
Section: Introductionmentioning
confidence: 99%
“…In the approach, the top layer is an aggregated model obtained on-line; the intermediate layer consists of production optimisation and inventory control; the bottom layer consists of a distributed control policy. Mo¨nch and Stehli (2003) suggested an ontology that is an appropriate hierarchical control approach to coordinate the autonomous entities of the hierarchy. Hwang and Chang (2003) describe the design of a two-level hierarchical production scheduling engine which consists of a mid-term scheduler and a short-term scheduler, and are aimed at achieving coordination between the fab-wide objectives and local shop-floor operations.…”
Section: Literature Reviewmentioning
confidence: 99%
“…A specific ontology (Mo¨nch and Stehli 2003) and content language (Mo¨nch and Stehli 2004) for production control in the semiconductor manufacturing domain are developed. The ontology contains more than 100 domain concepts and takes into account the hierarchical production control approach.…”
Section: Case Study: Fabmasmentioning
confidence: 99%