An iron (II) guanidinate compound: Synthesis, characterization, thermal properties and its application as a CVD precursor for iron oxide film

Abstract

An iron compound containing guanidinate ligand [Fe((SiMe 3 ) 2 NC( i PrN) 2 ) 2 ] was synthesized using a conventional lithium-salt-elimination reaction, and its chemical structure was characterized through elemental analysis, 1 H-NMR and single-crystal X-ray diffraction, respectively. The thermal properties of the compound were examined through thermogravimetric analysis (TGA), and the TGA results demonstrated that the compound possessed sufficient volatility and suitable thermal stability for the CVD process. Moreover, the deposition experiments were conducted using the synthesized compound as a precursor and O 2 as an oxygen source to confirm its applicability as a CVD precursor, and α-Fe 2 O 3 films were successfully deposited at a relatively low deposition temperature (300°C).