1990
DOI: 10.1016/0042-207x(90)94113-5
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An ion pump based leak detector

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Cited by 7 publications
(1 citation statement)
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“…It is based on a Varian patented technology [16]. The sensor technology incorporates an ion pump connected to a quartz capillary tube maintained under high vacuum.…”
Section: Selective Ion Pump Detectionmentioning
confidence: 99%
“…It is based on a Varian patented technology [16]. The sensor technology incorporates an ion pump connected to a quartz capillary tube maintained under high vacuum.…”
Section: Selective Ion Pump Detectionmentioning
confidence: 99%