An investigation of the removal of 1-Methyl-2-Pyrrolidinone (NMP)

Dallas, Andrew J.; Ding, Lefei; Joriman, Jon; Hoang, Brian; Seguin, Kevin; Zastera, Dustin

doi:10.1117/12.654839

Cited by 2 publications

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“…To this end, compounds such as NMP, amines, and siloxanes have been openly discussed in the literature through the years and have been addressed previously by the authors and their colleagues. [3][4][5]8,9 However, even though many other organics have been found in key locations within the cleanroom, some at significantly elevated concentrations, they have not been reported as creating any significant issues, until recently.…”

Section: Introductionmentioning

confidence: 97%

“…Over the years, the AMC contaminants of greatest concern in photolithography applications have changed dramatically. Since the early 1990s the focus of AMC filtration has ranged from ammonia (NH3), 1,2 n-methyl-2-pyrrolidinone (NMP), 3,4 amines, 5 sulfur dioxide (SO2) 6 and acid gases in general, 7 to siloxanes (HMDS, HMDSO, and TMS). 8,9 The issues associated with these contaminants have ranged from photoresist issues (e.g.…”

Section: Introductionmentioning

confidence: 99%

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An investigation of perfluoroalkylamine contamination control

Dallas

Zastera

2009

Metrology, Inspection, and Process Control for Microlithography XXIII

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Perfluoroalkylamine (PFAA) contamination has been observed to be a growing contamination issue in semiconductor fabs due to the increased tolerances demanded by next generation lithography processes. These contaminants are found within the cleanroom, process environments and within various tools and enclosures. As a result, effective control of PFAAs in lithographic processing and other critical environments are becoming an important filtration problem. This work was undertaken to evaluate filter performance for the removal of PFAAs and to provide an optimal filtration solution. The filter breakthrough performance of perfluorotributylamine (PFTBA), a common heat transfer fluid, is investigated over a range of environmental conditions for several commercially available adsorbent materials. The results from these accelerated tests indicate that PFAAs can be effectively removed with activated carbon-based chemical filters.

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