An investigation of phenomenal parasitics and robust control of parallel-plate electrostatic micro-actuators

Zhu, Guchuan; Chianetta, J.-F.; Hosseini, M.; Peter, Yves-Alain

doi:10.1117/12.692301

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2007

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“…It has been demonstrated that the fringing field effect and the deformations can be more simply modeled as series capacitors [3], [17]. The deformations also contribute to the parallel parasitics [2].…”

Section: Introductionmentioning

confidence: 98%

Robust Output Feedback Control of an Electrostatic Micro-Actuator

Zhu

Saydy

2007

2007 American Control Conference

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Due to compact layout, manufacturing tolerance, modeling errors, and environmental changes, microelectromechanical systems (MEMS) are subjected to parasitics and parametric variations. In order to better guarantee their stability and a certain level of performance, one must take into account these factors in the design of MEMS control systems. This work presents a robust output control scheme for a parallel-plate electrostatic micro-actuator in the presence of these uncertainties. The construction of the control law is based on a combination of input-to-state stability (ISS) and robust backstepping. The stability and the performance of the system are demonstrated through both stability analysis and numerical simulation.

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Section: Introductionmentioning

confidence: 98%