An investigation of electrophysical and thermophysical characteristics of low-frequency low-pressure inductive discharge of transformation type

Isupov, M. V.; Fedoseev, A. V.; Sukhinin, G. I.; Ulanov, I. M.

doi:10.1134/s0018151x15020121

Cited by 8 publications

(1 citation statement)

References 14 publications

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“…Examples of such systems are a socalled ferromagnetic enhanced ICP, FMICP, or transformer ICP. The term transformer ICP denotes an ICP enhanced with a ferromagnetic core of high permeability forming a closed magnetic circuit [17][18][19][20]. In such ICPs, the magnetic field produced by the primary current, is confined inside a magnetic path loop outside the plasma.…”

Section: Electromagneticsmentioning

confidence: 99%

Inductively coupled plasmas at low driving frequencies

Kolobov

Godyak

2017

Plasma Sources Sci. Technol.

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We discuss the peculiarities of inductively coupled plasma (ICP) at low driving frequencies. The ratio of electric to magnetic field, E cB , | ()| decreases with decreasing frequency according to Faraday's law-higher magnetic fields are required to induce the same electric field at lower frequencies. We point out that the ratio of E cB | ()| can be non-uniform in space depending on primary coil configuration and the presence of ferromagnetic materials. In this paper, we consider examples of low-frequency ICPs with negligibly small magnetic fields in plasma. The disparity of time scales for ion transport and the electron energy relaxation results in nonlinear plasma dynamics at low frequencies. Numerical simulations demonstrate that at low frequencies, the presence of plasma has very little effect on spatial distributions of the electric and magnetic fields, which are determined solely by the coil geometry and by the presence of ferromagnetic cores. Simulations of plasma dynamics in ICP over a wide range of driving frequencies and gas pressures illustrate high-frequency, quasi-static and dynamic regimes of discharge operation and explain some trends observed in experiments.

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Section: Electromagneticsmentioning

confidence: 99%

Inductively coupled plasmas at low driving frequencies

Kolobov

Godyak

2017

Plasma Sources Sci. Technol.

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Etching of a fluoropolymer coating synthesized by the hot wire chemical vapor deposition method in a low-frequency induction discharge plasma

Petrova,

Pinaev,

Safonov

et al. 2024

E3S Web Conf.

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The process of plasma etching for the formation of a biphilic pattern in a continuous homogeneous fluoropolymer coating on a copper substrate is studied. Argon or oxygen plasma of low frequency ferromagnetic amplified induction discharge is used to etch a fluoropolymer coating. Plasma etching was carried out through a mask with parallel slits. The etching rate in argon plasma was 10 nm/min, the etching rate in oxygen plasma was 60 nm/min. Biphilic surfaces were obtained, consisting of fluoropolymer strips on a copper surface. It has been shown that when using both argon plasma and oxygen plasma, it is possible to create biphilic surfaces by etching a continuous homogeneous fluoropolymer coating through a mask. Moreover, oxygen plasma is better suited for this because it has a higher etching rate and weakly changes the wettability of the surface.

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