An intermittent frequency offset lock of a transverse Zeeman laser to an iodine stabilized He-Ne laser

Yasui, Takeshi; Araki, Tsutomu; Suzuki, Norihito

doi:10.1007/bf02931719

Cited by 4 publications

(1 citation statement)

References 13 publications

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“…A schematic of the optical system is shown in figure 1. The light source of the system is a frequency-stabilized transverse Zeeman He-Ne laser (λ = 633 nm) [13]. The output power is 2 mW and the beam diameter (e −2 of peak intensity) is 0.8 mm.…”

Section: Optical Systemmentioning

confidence: 99%

Sub-nanometre double shearing heterodyne interferometry for profiling large scale planar surfaces

Yokoyama

Yoshimori

et al. 2004

Meas. Sci. Technol.

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A novel interferometric method, called a double shearing interferometry, is presented for profiling large-scale quasi-planar surfaces, such as semiconductor wafers, optical flats and x-ray mirrors. The surface profile is measured even under existence of the inclination of a scanning stage. By adopting the common-path optical configuration and the heterodyne detection, the proposed method realizes excellent resolution in sub-nanometer order and enables a robust measurement against unwanted disturbances due to the measurement environments. A height resolution of 0.1nm was experimentally achieved. A standard deviation of the analytical surface profiles was found to be 1.3nm, even when using a conventional screw-lead scanning stage. The measured results show that the surface profile and stage inclination are separately determined.We confirmed resultant profile was well consistent with the one measured with Fizeau interferometer.

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Section: Optical Systemmentioning

confidence: 99%