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2008
DOI: 10.1088/0957-4484/19/27/275501
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An integrated superconductive magnetic nanosensor for high-sensitivity nanoscale applications

Abstract: An integrated magnetic nanosensor based on a niobium dc SQUID (superconducting quantum interference device) for nanoscale applications is presented. The sensor, having a washer shape with a hole of 200 nm and two Josephson-Dayem nanobridges of 80 nm × 100 nm, consists of a Nb(30 nm)/Al(30 nm) bilayer patterned by electron beam lithography (EBL) and shaped by lift-off and reactive ion etch (RIE) processes. The presence of the niobium coils, integrated on-chip and tightly coupled to the SQUID, allows us to easil… Show more

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Cited by 80 publications
(63 citation statements)
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References 31 publications
(52 reference statements)
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“…Above a few tens of Hz the low frequency 1/f -like noise changes into white noise on the level of 3 × 10 −5 to 1.8 × 10 −6 Φ 0 / √ Hz over a wide range of fields, which translates into a field sensitivity of 1.1 × 10 −7 T. Our flux sensitivity is comparable to that of state of the art SQUIDs, 21 yet the area of the SOT loop is only 0.034 µm 2 , which is the smallest reported to date. 4,9 The small size of SOT is highly advantageous for spin detection since spin sensitivity in units of µ B / √ Hz is given by…”
Section: Introductionmentioning
confidence: 99%
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“…Above a few tens of Hz the low frequency 1/f -like noise changes into white noise on the level of 3 × 10 −5 to 1.8 × 10 −6 Φ 0 / √ Hz over a wide range of fields, which translates into a field sensitivity of 1.1 × 10 −7 T. Our flux sensitivity is comparable to that of state of the art SQUIDs, 21 yet the area of the SOT loop is only 0.034 µm 2 , which is the smallest reported to date. 4,9 The small size of SOT is highly advantageous for spin detection since spin sensitivity in units of µ B / √ Hz is given by…”
Section: Introductionmentioning
confidence: 99%
“…Above a few tens of Hz the low frequency 1/f -like noise changes into white noise on the level of 3 × 10 −5 to 1.8 × 10 −6 Φ 0 / √ Hz over a wide range of fields, which translates into a field sensitivity of 1.1 × 10 −7 T. Our flux sensitivity is comparable to that of state of the art SQUIDs, 21 yet the area of the SOT loop is only 0.034 µm 2 , which is the smallest reported to date. 4,9 The small size of SOT is highly advantageous for spin detection since spin sensitivity in units of µ B / √ Hz is given bywhere R is the radius of the loop, h is the height of the loop above the spin dipole, r e = 2.82 ×10 −15 m, and Φ n is the flux sensitivity in Φ 0 / √ Hz. 12,22 For h < R we obtain spin sensitivity of 65 We have integrated the SOT into a scanning probe microscope operating at 300 mK in which the tip is glued to one tine of a quartz tuning fork.…”
mentioning
confidence: 99%
“…The superconducting loop has a washer shape in order to enhance the heat dissipation during the working operations when the sensor is current biased in resistive mode. The sample fabrication procedure has been described in details elsewhere [7], so only an outline of the sensor design and the main fabrication steps is given here. The fabrication process is based on thin films patterned by both electron beam lithography (EBL) and optical lithography as well as lift off and reactive ion etching (RIE) processes.…”
Section: Sample Fabrication and Sensor Performancementioning
confidence: 99%
“…Due to their insensitivity to background magnetic fields, such nano-SQUIDs are ideal for making local magnetic measurements. Reaching a spectral density of magnetic moment noise as low as few µ B /Hz 1/2 [5][6][7][8] (µ B is the Bohr magneton) referred to a sensor geometrical area of about (200 x 200 nm2), the nano-SQUIDs are suitable for the above cited applications. Recently, preliminary measurements of magnetization from ferritin nano-particles have been reported [6].…”
Section: Introductionmentioning
confidence: 99%
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