An Integrated Forward-View 2-Axis Mems Scanner for Compact 3D Lidar

Wang, Dingkang; Rojas, Stephan Strassle; Shuping, Alexander; Tasneem, Zaid; Koppal, Sanjeev J.; Xie, Huikai

doi:10.1109/nems.2018.8557009

Cited by 7 publications

(8 citation statements)

References 9 publications

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“…The scanner has been applied in a LiDAR prototype, which has a volume of 100 mm × 100 mm × 60 mm and a weight of <100 g. The LiDAR prototype is suitable for sensing applications used in small UAVs. In the same year, in the study by the same research group, [ 47 ] a novel design of MEMS mirrors bending vertically to the substrate has been demonstrated. The vertical mirror scheme is able to perform direct forward scanning without beam folding compared to the conventional case where mirrors are parallel to the substrate.…”

Section: Conventional Solid‐state Lidar Sensormentioning

confidence: 99%

Section: Conventional Solid‐state Lidar Sensormentioning

confidence: 99%

“…The forward‐view scanner has a compact size of 4 mm × 4.5 mm × 1.6 mm and a light weight of 16 mg, and hence can be applied for small‐size LiDAR in micro‐air vehicles. [ 47 ] Also based on the electro‐thermal actuation mechanism, in 2019, the same group reported a large aperture two‐axis MEMS mirror, with mirror plate size of 2 × 2.5 mm 2 , and an optical FOV of 15° × 12°. [ 48 ] The SEM image of the fabricated MEMS mirror is shown in Figure 4e.…”

Section: Conventional Solid‐state Lidar Sensormentioning

confidence: 99%

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A Progress Review on Solid‐State LiDAR and Nanophotonics‐Based LiDAR Sensors

Xue

et al. 2022

Laser & Photonics Reviews

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Light detection and ranging (LiDAR) sensors enable precision sensing of an object in 3D. LiDAR technology is widely used in metrology, environment monitoring, archaeology, and robotics. It also shows high potential to be applied in autonomous driving. In traditional LiDAR sensors, mechanical rotator is used for optical beam scanning, which brings about limitations on their reliability, size, and cost. These limitations can be overcome by a more compact solid‐state solution. Solid‐state LiDAR sensors are commonly categorized into the following three types: flash‐based LiDAR, microelectromechanical system (MEMS)‐based LiDAR, and optical phased array (OPA)‐based LiDAR. Furthermore, advanced optics technology enables novel nanophotonics‐based devices with high potential and superior advantages to be utilized in a LiDAR sensor. In this review, LiDAR sensor principles are introduced, including three commonly used sensing schemes: pulsed time of flight (TOF), amplitude‐modulated continuous wave TOF, and frequency‐modulated continuous wave. Recent advances in conventional solid‐state LiDAR sensors are summarized and presented, including flash‐based LiDAR, MEMS‐based LiDAR, and OPA‐based LiDAR. The recent progress on emerging nanophotonics‐based LiDAR sensors is also covered. A summary is made and the future outlook on advanced LiDAR sensors is provided.

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Section: Conventional Solid‐state Lidar Sensormentioning

confidence: 99%

Section: Conventional Solid‐state Lidar Sensormentioning

confidence: 99%

Section: Conventional Solid‐state Lidar Sensormentioning

confidence: 99%

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A Progress Review on Solid‐State LiDAR and Nanophotonics‐Based LiDAR Sensors

Xue

et al. 2022

Laser & Photonics Reviews

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“…Typical MEMS scanners for these applications use various actuation methods and are often resonant systems operating at frequencies under 50 kHz [1], [2], [3]. These speeds are well suited for high-definition displays to be observed by human users, on surface sizes ranging from head-up displays to wall-mounted projection screens [4].…”

Section: Introductionmentioning

confidence: 99%

A High-Frequency Tunable Piezoelectric MEMS Scanner for Fast Addressing Applications

Janin

Bauer

Griffin

et al. 2021

2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

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We present a high-frequency, tunable, piezoelectric MEMS resonant scanner producing an optical scan angle of more than 2°at frequencies above 100 kHz, with noncontact frequency tuning capabilities. The device is fabricated using a cost-efficient multiuser silicon-on-insulator (SOI) process. The scanner uses thin-film piezoelectric aluminium nitride actuators to drive out-of-plane rotation of a 200 µm diameter mirror plate through mechanical coupling stages. Up to 3.6 kHz frequency tuning is achieved through on-chip thermally actuated non-contact beam tips placed adjacent to the scanner. The scanner is intended for use in small-scale, fast optomechanical applications requiring careful synchronization through frequency tuning.

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“…For this purpose, mirror actuation should be as fast as possible. Electrothermal highest rotational resonant modes usually reach a ceiling around 1.4 kHz [14], despite a few counter-examples achieving frequencies of 2.2 kHz [15] when they are composed of Al/SiO 2 bimorphs and 2.74 kHz [16], or even 12.8 kHz [17] with a smaller mirror plate based on Cu/W bimorphs but exhibiting reliability issues due to Cu oxidation [18], drastically attenuated magnitudes or mirror plate dynamic distortions. Although raster scans are more uniform than Lissajous ones, the strong frequency imbalance between the two axes avoids, on both axes, to benefit from the angular gain and improved stability when working near the mechanical resonance.…”

Section: Introductionmentioning

confidence: 99%

Real-time Lissajous imaging with a low-voltage 2-axis MEMS scanner based on electrothermal actuation

Tanguy¹,

Gaiffe²,

Passilly³

et al. 2020

Opt. Express

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Laser scanning based on Micro-Electro-Mechanical Systems (MEMS) scanners has become very attractive for biomedical endoscopic imaging, such as confocal microscopy or Optical Coherence Tomography (OCT). These scanners are required to be fast to achieve real-time image reconstruction while working at low actuation voltage to comply with medical standards. In this context, we report a 2-axis Micro-Electro-Mechanical Systems (MEMS) electrothermal micro-scannercapable of imaging large fields of view at high frame rates, e.g. from 10 to 80 frames per second. For this purpose, Lissajous scan parameters are chosen to provide the optimal image quality within the scanner capabilities and the sampling rate limit, resulting from the limited A-scan rate of typical swept-sources used for OCT. Images of 233 px × 203 px and 53 px × 53 px at 10 fps and 61 fps, respectively, are experimentally obtained and demonstrate the potential of this micro-scannerfor high definition and high frame rate endoscopic Lissajous imaging.

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An Integrated Forward-View 2-Axis Mems Scanner for Compact 3D Lidar

Cited by 7 publications

References 9 publications

A Progress Review on Solid‐State LiDAR and Nanophotonics‐Based LiDAR Sensors

A Progress Review on Solid‐State LiDAR and Nanophotonics‐Based LiDAR Sensors

A High-Frequency Tunable Piezoelectric MEMS Scanner for Fast Addressing Applications

Real-time Lissajous imaging with a low-voltage 2-axis MEMS scanner based on electrothermal actuation

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