An Inchworm Type Piezoelectric Actuator Working in Resonant State

Tian, Xinqi; Quan, Qiquan; Wang, Liang; Su, Qiang

doi:10.1109/access.2018.2814010

Cited by 47 publications

(21 citation statements)

References 48 publications

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“…However, for the motor design, the relationship between the specifications of the PM (i.e., type and size) and precision motor performance (i.e., driving force and travel) is what professional developers want to know most. The above cases also appear in References [ 15 , 16 , 17 , 18 , 19 ]. In view of the issues mentioned, a multi-physics field coupling simulation involving electrostatics and solid mechanics using FEM was established for direct PIM performance evaluation to assist the motor design and development under certain PM.…”

Section: Introductionmentioning

confidence: 83%

Modeling of Motion Characteristics and Performance Analysis of an Ultra-Precision Piezoelectric Inchworm Motor

2020

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Ultra-precision piezoelectric inchworm motor (PIM) is widely used as optical equipment, in the microelectronics semiconductor industry, and in precision manufacturing for motion and positioning, but the multi-physics field simulation model for PIM performance estimation and assisting motor design is rarely studied. The simulation model in this paper aimed to provide researchers with direct and convenient PIM performance evaluation to assist the motor design and development. According to the existing advanced inchworm motor products, a multi-physics field coupling model involving solid mechanics and electrostatics using the finite element method (FEM) was established. The motion gesture and performance (driving force and travel) of the PIM were analyzed, respectively. The simulation results showed that the motion gesture of the inchworm motor was well consistent with that of the actual motor product. The driving force from the simulation was close to that of the actual product, and the maximum error was 2.8%. As for the PIM travel, there was a maximum travel error of 0.6 μm between the simulation and official data. The performance parameters of the piezoelectric materials under certain specifications can be simulated by the multi-physics field coupling model. Therefore, the multi-physics field coupling simulation model is suitable for PIM performance evaluation and assisting motor development.

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Section: Introductionmentioning

confidence: 83%

Modeling of Motion Characteristics and Performance Analysis of an Ultra-Precision Piezoelectric Inchworm Motor

2020

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“…The high-speed motion performance of the resonant type is superior, but the problems of wear and heat are still to be solved [17,18]. Compared with the inchworm type, the structure of the stick-slip type is relatively simple and easy to control, but its output performance is weak [19,20].…”

Section: Introductionmentioning

confidence: 99%

Design and Locomotion Study of Stick-Slip Piezoelectric Actuator Using Two-Stage Flexible Hinge Structure

Zhao

et al. 2021

Micromachines

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A novel piezoelectric actuator using a two-stage flexure hinge structure is proposed in this paper, which is used in a compact and high-precision electromechanical field. The two-stage flexure hinge structure is used to provide horizontal thrust and vertical clamping force to the driving feet, which solves the problems of unstable clamping force and insufficient load capacity in traditional stick-slip piezoelectric actuators. Firstly, the main structure of the driver and the working process under the triangular wave excitation voltage are briefly introduced. Secondly, after many simulation tests, the structure of the actuator is optimized and the stability of the structure in providing clamping force is verified. Finally, through the research of the operating performance, when the amplitude is 150 V and the frequency is 3.25 kHz as the excitation source, the maximum speed can reach 338 mm/s and can bear about 3 kg load. It can be seen from the analysis that the two-stage flexure hinge structure can improve the displacement trajectory.

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“…However, almost all inchworm type piezoelectric actuators require three piezoelectric units [6][7][8][9]: two for clamping and one for driving, which makes their structure and controls complicated. Tian X et al presented an actuator that achieves clamping and driving by different resonance models of the structure [10]. Nevertheless, it demands three piezoelectric chips, too.…”

Section: Introductionmentioning

confidence: 99%

Theoretical and Experimental Investigations into a Crawling Robot Propelled by Piezoelectric Material

Zeng

Han

et al. 2021

Micromachines

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Conventional motors with complicated electromagnetic structures are difficult to miniaturise for millimetre- and centimetre-sized robots. Instead, small-scale robots are actuated using a variety of functional materials. We proposed a novel robot propelled by a piezoelectric ceramic in this work. The robot advances due to the asymmetric friction created by the spikes on the surface. The structural modelling was completed, static and dynamic models were established to predict the moving characteristics, the prototype was built using three dimensional (3D) printing technology, and the models were evaluated via experiments. Compared with conventional inchworm-type robots, the proposed robot is superior in simple structure because the clamping components are replaced by spikes with asymmetric friction. Compared with SMA (shape memory alloy) actuating inchworm-type robots, it has a faster velocity with higher resolution. Meanwhile, the components are printed through an additive manufacturing process that is convenient and avoids assembly errors. This design could make contributions to many areas, such as pipe inspection, earthquake rescue, and medicine delivery.

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An Inchworm Type Piezoelectric Actuator Working in Resonant State

Cited by 47 publications

References 48 publications

Modeling of Motion Characteristics and Performance Analysis of an Ultra-Precision Piezoelectric Inchworm Motor

Modeling of Motion Characteristics and Performance Analysis of an Ultra-Precision Piezoelectric Inchworm Motor

Design and Locomotion Study of Stick-Slip Piezoelectric Actuator Using Two-Stage Flexible Hinge Structure

Theoretical and Experimental Investigations into a Crawling Robot Propelled by Piezoelectric Material

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