An improved phase measuring deflectometry method for defect detection of specular reflection surface

Shi, Wei; Lu, Shihao; Han, Min Cheol; Hu, Jiangyong; Liao, Chengwei; Zhu, Shidong; Qian, Xiang; Wang, Xiaohao; Li, Xinghui

doi:10.1117/12.2602234

Cited by 2 publications

(1 citation statement)

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“…Fringe projection profilometry is a kind of method of 3D measurement based on active structure light. Fringe projection profilometry has been mainstream and has numerous variant methods, which mainly focus on the fringe projection, phase retrieval, system calibration, highreflectivity reconstruction, high-speed reconstruction [8][9][10][11][12][13].…”

Section: Introductionmentioning

confidence: 99%

A novel calibration method for a uniaxial MEMS-based 3D reconstruction system

Han

Lei²,

Tao³

et al. 2023

Optoelectronic Imaging and Multimedia Technology IX

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Fringe projection profilometry using a uniaxial MEMS micro-vibration mirror is becoming popular in three-dimensional (3D) reconstruction owing to the advantages of fast projection, small size, low cost, and no demand of focus optics. The calibration method is crucial and directly affects the accuracy of 3D reconstruction. In conventional phase-height calibration methods, there exists a problem of recalibration of system parameters if the maximum fringe frequency varies between the stages of calibration and reconstruction. In this paper, the fringe projection is realized by a MEMS mirror with a 1.15 kHz resonant frequency and a line laser. The voltage of line laser is modulated according to the scanning position, which is related to the vibration characteristics of MEMS mirror. Subsequently, the uniaxial MEMS-based 3D reconstruction system is constructed. We propose a novel calibration method for the uniaxial MEMS-based 3D reconstruction system. The proposed calibration method is derived from the scanning characteristics of a uniaxial vibration mirror and considers the camera distortion. The proposed method is free from the problem of recalibration and the limitations of installation. The experimental results show the proposed method can reconstruct the 3D shape of target in high resolution and verify the feasibility of the system.

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