An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers

Cai, Pengcheng; Xiong, Xingyin; Wang, Kunfeng; Wang, Jiawei; Zou, Xudong

doi:10.3390/mi12091022

Cited by 17 publications

(11 citation statements)

References 24 publications

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“…Its sensing principles can be extended to liquid medium and to perform mass [41], viscosity [42], or viscoelasticity [43], [44] sensing. Technical solutions to stabilize the effect of cross-sensitivities to different atmospheric parameters (such as temperature, humidity, or radiation effects) must be sought [45] and implemented in real applications based on this platform.…”

Section: Discussionmentioning

confidence: 99%

Low Limit of Detection Gas Density Sensing With a Digitally PI-Controlled Microcantilever

Mouro

Paoletti

Sartore³

et al. 2023

IEEE Sensors J.

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This work describes a new platform for sensing mass or rheological properties of gases with unprecedented responsivity and limits of detection. The system consists of a microcantilever working in a phase-locked loop (PLL) with an imposed phase between its excitation and deflection signals. The optically detected cantilever deflection is demodulated against digitally synthetized reference signals, and the quadrature component (Q-signal) is used as the error parameter in a PI controller, which continuously tracks the oscillation frequency. The direct digital synthesis of the reference and actuation signals allows low-noise and fast-transient responses of the sensor for real-time detection of minute changes of any environmental parameter. A general analytical model is derived, used to understand the dynamical response of the platform, and validated against experiments using different gases and pressures. In particular, the responsivity of the sensor to density variations of the fluids and the stability of its frequency response are studied and measured. It is shown that the responsivity and the achieved limits of detection depend on the chosen phase imposed in the loop. A limit of detection for density variations of 3.5 × 10 −4 kg/m 3 in air is measured, in agreement with the theoretical predictions, and one to two orders of magnitude lower than any reported value achieved with the same type of physical uncoated resonant sensors.

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Section: Discussionmentioning

confidence: 99%

Low Limit of Detection Gas Density Sensing With a Digitally PI-Controlled Microcantilever

Mouro

Paoletti

Sartore³

et al. 2023

IEEE Sensors J.

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“…A resonant accelerometer with an intrinsically temperature-drift suppression phase-locked loop and MEMS voltage controlled oscillator exhibited a bias temperature coefficient that was 5.5 times lower than the uncompensated design [27]. An improved temperature compensation method was proposed by modeling with common-mode temperature sensitivity of the two differential resonators, which demonstrated that the temperature sensitivity is reduced from 43.16 ppm • C −1 to 0.83 ppm • C −1 within a range of −10 • C to 70 • C [28]. Another temperature compensation method based on real-time quality factor measurement was proposed in [29], where the bias stability of an accelerometer improved from 35.2 mg to 0.08 mg under temperature cycling between −40 • C and 40 • C. Among various temperature compensation methods, accurate sensing of the resonator temperature and modeling the temperature drift are two of the most challenging aspects in design of a high-performance MRA.…”

Section: Introductionmentioning

confidence: 99%

Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer

Wang

et al. 2023

J. Micromech. Microeng.

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Temperature-dominated drift is generally the main error source for high-performance micromachined resonant accelerometers (MRAs) due to inherent thermal stress effect of resonator structure and die-attach process. This paper describes a design and experimental evaluation of a temperature compensation scheme for MEMS resonant accelerometers that demonstrates excellent bias and scale factor stability against temperature variation. An on-chip temperature sensor fabricated by sputtering platinum film on glass substrate is proposed to accurately sense the temperature-induced frequency change of the resonator. Post-compensation algorithm is used to suppress the temperature sensitivity of the MRA over dynamic temperature environment. The temperature drift test and compensation of four MEMS accelerometers with navigation-grade performance in a range from -40 to 60 °C show that the stability of bias and scale factor has been improved greatly. Temperature compensation results with a polynomial fitting model and a convolutional neural network (CNN) model are presented and compared to suppress the temperature drift hysteresis in consecutive temperature-varying tests. These experimental results indicate that this resonant accelerometer exhibits excellent temperature stability after compensation, which offers the promise for high-performance inertial navigation applications.

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“…); and analyze the number of layers of the target that have penetrated the target to drive the position of the projectile. When the projectile reaches a predetermined number of target layers, the fuze emits a detonation signal and detonates the explosive to achieve the optimal destruction of the penetrated target [ 20 ]. The existing fuze layer counting techniques often rely on single-axis acceleration sensors to sense the overload of the projectile as it penetrates each layer of the target and the calculation of the number of target layers is achieved by using a comparison of the overload signal amplitude and threshold; great progress has been made in engineering applications.…”

Section: Introductionmentioning

confidence: 99%

Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection

Cui,

Chuai,

Huang

et al. 2023

Micromachines

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The problem that the fuze overload signal sticks and is not easily identified by the counting layer during the high-speed intrusion of the projectile is an important factor affecting the explosion of the projectile in the specified layer. A three-pole plate dual-capacitance acceleration sensor based on the capacitive sensor principle is constructed in this paper. The modal simulation of the sensor structure is carried out using COMSOL 6.1 simulation software, the structural parameters of the sensor are derived from the mechanical properties of the model, and finally the physical sensor is processed and fabricated using the derived structural parameters. The mechanical impact characteristics of the model under different overloads were investigated using ANSYS/LS-DYNA, and the numerical simulation of the projectile intrusion into the three-layer concrete slab was carried out using LS-DYNA. Under different overload conditions, the sensor was tested using the Machette’s hammer test and the output signal of the sensor was obtained. The output signal was analyzed. Finally, a sensor with self-powered output, high output voltage amplitude, and low spurious interference was obtained. The results show that the ceramic capacitive sensor has a reasonable structure, can reliably receive vibration signals, and has certain engineering applications in the intrusion meter layer.

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An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers

Cited by 17 publications

References 24 publications

Low Limit of Detection Gas Density Sensing With a Digitally PI-Controlled Microcantilever

Low Limit of Detection Gas Density Sensing With a Digitally PI-Controlled Microcantilever

Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer

Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection

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