An improved analysis of the scattering properties of half-space problem with multiple defect particles for an optical surface

Gong, Lei; Wu, Zhensen; Li, Z.J.; Zhang, G.

doi:10.1016/j.jqsrt.2015.04.007

Cited by 8 publications

(3 citation statements)

References 26 publications

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“…Due to the micro-roughness existing on the wafer surface, a small amount of scattered signal, called the haze signal, is formed [4] . Such signal is the prevalent underlying signal and is the main factor affecting the accuracy of the dark field defect inspection system [5] . The signal-to-noise ratio of the system can be improved by optimizing the incident conditions, such as wavelength and incident angle [6] , but its effectiveness depends on the system structure [7] .…”

Section: Introductionmentioning

confidence: 99%

Elliptical polarization characterization of scattered light in dark field defect inspection technology

Wu,

Xu,

Liu

2023

3rd International Conference on Laser, Optics, and Optoelectronic Technology (LOPET 2023)

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In the field of unpatterned wafer inspection, the biggest market share is dark field defect inspection, in which the signalto-noise ratio limits the detection limit. In order to improve the signal-to-noise ratio of the optical detection method based on the theory of dark-field scattered light. In this paper, the influence of the polarization characteristic of light on the scattering field is studied, and the signal-to-noise ratio of the scattering signal can be improved by controlling the polarization component of light. The results show that modulating the polarized light can achieve a higher signal-to-noise ratio.

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Section: Introductionmentioning

confidence: 99%

Elliptical polarization characterization of scattered light in dark field defect inspection technology

Wu,

Xu,

Liu

2023

3rd International Conference on Laser, Optics, and Optoelectronic Technology (LOPET 2023)

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“…[1][2][3][4][5] In the field of nondestructive examination, the optical surface is invariably observed as a surface without roughness. Research on rough surface [6,7] and the scattering properties of the halfspace problem with multiple defect particles for an optical surface without roughness [8] has been discussed. It is well known that the roughness of the optical surface inevitably limits properties of the system.…”

Section: Introductionmentioning

confidence: 99%

Difference scattering field properties between periodic defect particles and three-dimensional slightly rough optical surface

Chen¹,

Wu²,

Bai³

et al. 2017

Chinese Phys. B

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Based on the practical situation of nondestructive examination, the calculation model of the composite scattering is established by using a three-dimensional half-space finite difference time domain, and the Monte Carlo method is used to solve the problem of the optical surface with roughness in the proposed scheme. Moreover, the defect particles are observed as periodic particles for a more complex situation. In order to obtain the scattering contribution of defects inside the optical surface, a difference radar cross section is added into the model to analyze the selected calculations on the effects of numbers, separation distances, different depths and different materials of defects. The effects of different incident angles are also discussed. The numerical results are analyzed in detail to demonstrate the best position to find the defects in the optical surface by detecting in steps of a fixed degree for the incident angle.

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“…Another approach to light scattering, namely Finite Difference Time Domain (FDTD) method, is used by Gong et al [50] to study the scattering properties associated to the presence of multiple defect particles for optical surfaces in order to perform a defect characterization. This study may be related to the issue of optical system performances which are directly influenced by optical surface qualities.…”

mentioning

confidence: 99%

Preface: Laser-light and Interactions with Particles (LIP), 2014

Gouesbet¹,

Onofri²

2015

Journal of Quantitative Spectroscopy and Radiative Transfer

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An improved analysis of the scattering properties of half-space problem with multiple defect particles for an optical surface

Cited by 8 publications

References 26 publications

Elliptical polarization characterization of scattered light in dark field defect inspection technology

Elliptical polarization characterization of scattered light in dark field defect inspection technology

Difference scattering field properties between periodic defect particles and three-dimensional slightly rough optical surface

Preface: Laser-light and Interactions with Particles (LIP), 2014

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