An <i>In-Situ</i> Self-Test Method for Measuring Absorptivity of Film-Type Uncooled Infrared Detectors

Hou, Ying; Fu, Jianyu; Lu, Yihong; Liu, Jinbiao; Zhang, Jian

doi:10.1109/jmems.2021.3120811

Cited by 3 publications

(2 citation statements)

References 31 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…As Al is compatible with the CMOS process and easier to be patterned in the manufacturing process, therefore, Al is adopted as the material of microheater in this work. To further verify the conception, the properties of Pt and PolySi are compared and analyzed with those of Al in the following work, since previous studies mostly used Pt and PolySi as the microheater materials [ 5 , 27 , 30 , 31 ].…”

Section: Resultsmentioning

confidence: 99%

A Highly Accurate Method for Measuring Response Time of MEMS Thermopiles

Shi

Zhou

et al. 2022

Micromachines

View full text Add to dashboard Cite

The response time is an important parameter for thermopiles sensors, which reflects the response speed of the device. The accurate measurement of response time is extremely important to evaluate device characteristics for using them in suitable scenarios. In this work, to accurately measure the response time of thermopile sensors, an Al microheater is integrated in a MEMS thermopile as an in—situ heat source. Compared with the traditional chopper measurement method for response time, this approach avoids mechanical delay induced by chopper blades. Accordingly, based on this approach, the response time of the device is measured to be 6.9 ms, while that is 12.7 ms when a chopping system is used, demonstrating that an error of at least 5.8 ms is avoided. Such an approach is quite simple to realize and provides a novel route to accurately measure the response time.

show abstract

Section: Resultsmentioning

confidence: 99%

A Highly Accurate Method for Measuring Response Time of MEMS Thermopiles

Shi

Zhou

et al. 2022

Micromachines

View full text Add to dashboard Cite

show abstract

“…In order to extract the solid thermal conductance G s of three WAT structures, thermal conductance G and radiative thermal conductance G r should be measured. Using equation ( 16) and the measured heating resistor resistance at room temperature R 0 and resistance change ∆R, the thermal conductance G can be got under a known electrical power P. Furthermore, the absorptivity can be extracted from the relation of thermal conductance to sensitive temperature, so the radiative thermal conductance G r can also be got, and its detailed principle and method are given by [27]. We measured the absorptivity of the WAT structure as 0.409, and the radiative thermal conductance G r can be expressed as:…”

Section: Measurementmentioning

confidence: 99%

Wafer acceptance test structures for characterization of thermoelectric materials’ thermal conductivity of thermopile sensors

Fan

Fu²,

Huang³

et al. 2023

J. Micromech. Microeng.

Self Cite

View full text Add to dashboard Cite

Thermopile sensors have a wide range of applications in consumer and industry. Thermopile is the key component of thermopile sensors, and thermal conductivity is a basic thermal parameter of thermopile. Extracting the thermal conductivity of thermoelectric materials in thermopile sensors is of great importance. In this work, wafer acceptable test (WAT) structures that fabricated along with thermopile sensors are presented. They could guarantee the measured materials are identical to those used in thermopile sensors. The test results are consistent with the reported values, and the validity of structures is verified. This method has the advantages of on-line extraction over a wide temperature range, and simultaneous extraction of thermal conductivity of connecting wire.

show abstract

A Time-Efficient Self-Test Method for Evaluating Thermal Parameters of Uncooled Infrared Detectors

Hou

Liu

et al. 2022

IEEE Trans. Instrum. Meas.

View full text Add to dashboard Cite

An In-Situ Self-Test Method for Measuring Absorptivity of Film-Type Uncooled Infrared Detectors

Cited by 3 publications

References 31 publications

A Highly Accurate Method for Measuring Response Time of MEMS Thermopiles

A Highly Accurate Method for Measuring Response Time of MEMS Thermopiles

Wafer acceptance test structures for characterization of thermoelectric materials’ thermal conductivity of thermopile sensors

A Time-Efficient Self-Test Method for Evaluating Thermal Parameters of Uncooled Infrared Detectors

Contact Info

Product

Resources

About