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1983
DOI: 10.1109/jlt.1983.1072104
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An external cavity diode laser sensor

Abstract: Abstract-A simple compact optical sensor system consisting of a near-field external cavity coupled to a semiconductor laser is reported. In this device, a change of phase in the light fed back into the laser cavity by the perturbed external mirror modulates the output of the laser by effectively changing the laser facet reflectivity. Phase shifts of 9 .rad and rad were measured at 10 kHz and 100 Hz, respectively, using a 1-Hz bandwidth and a 98-percent reflector placed less than 10 pm from the laser facet. The… Show more

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Cited by 23 publications
(8 citation statements)
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“…The use of external cavity laser for precise displacement measurement has a long history (Miles et al 1983;Lang & Kobayashi 1980) using traditional technology. In such configuration (cf.…”
Section: Vibration/acceleration Sensor With Very-short External Cavitmentioning
confidence: 99%
“…The use of external cavity laser for precise displacement measurement has a long history (Miles et al 1983;Lang & Kobayashi 1980) using traditional technology. In such configuration (cf.…”
Section: Vibration/acceleration Sensor With Very-short External Cavitmentioning
confidence: 99%
“…The SMI effect is explained by a model of the external-cavity laser diode 8,[23][24][25] shown in Fig. 1͑b͒.…”
Section: Smi Signalmentioning
confidence: 99%
“…This PD can be used for detecting the self-mixing signal. With a simply constructed optical system, the self-mixing effect has been applied to many kinds of optical sensors 7,8 and Doppler velocimeters. [9][10][11] The signal obtained by the self-mixing effect is a kind of interference signal and is called the self-mixing interference ͑SMI͒ signal.…”
Section: Introductionmentioning
confidence: 99%
“…10 A technique based on laser diode feedback is limited by laser intensity noise to 2ϫ10 Ϫ4 Å rms /ͱHz. 17,18 The beam diffraction technique is a factor of 1.6 -28 worse than these methods. However, the beam diffraction technique is simpler and more practical to implement in near-field microscopes than any of the above methods.…”
Section: Minimum Detectable Displacement In Near-field Scanning Opticmentioning
confidence: 99%