An experimental study of high gain parametric amplification in MEMS

Zhen, Hu; Gallacher, Barry J.; Harish, K M; Burdess, J.S.

doi:10.1016/j.sna.2009.11.016

Cited by 26 publications

(10 citation statements)

References 16 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…PE can achieve very large oscillation amplitudes with relatively low levels of excitation. Because of this, many resonators have been designed to use PE rather than direct forcing [3,22,[24][25][26][27][28][29][30][31][32]. In electrostatic MEMS, the electric field creates a distributed force on the surface of the beam, which is nonlinearly related to the gap distance.…”

Section: Introductionmentioning

confidence: 99%

A parametric electrostatic resonator using repulsive force

Pallay

Towfighian

2018

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

In this paper, parametric excitation of a repulsive force electrostatic resonator is studied. A theoretical model is developed and validated by experimental data. A correspondence of the model to Mathieu's Equation is made to prove the existence and location of parametric resonance. The repulsive force creates a combined response that shows parametric and subharmonic resonance when driven at twice its natural frequency. The resonator can achieve large amplitudes of almost 24 m and can remain dynamically stable while tapping on the electrode. Because the pull-in instability is eliminated, the beam bounces off after impact instead of sticking to the electrode. This creates larger, stable trajectories that would not be possible with traditional electrostatic actuation. A large dynamic range is attractive for MEMS resonators that require a large signal-to-noise ratio.

show abstract

Section: Introductionmentioning

confidence: 99%

A parametric electrostatic resonator using repulsive force

Pallay

Towfighian

2018

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

show abstract

“…Parametric amplification of approximately two orders of magnitude has been demonstrated in a forced mode of a micro-ring gyroscope [3]. Whilst this demonstration was performed in open loop, it does suggest that parametric amplification offers significant potential to MEMS gyroscopes.…”

Section: Introductionmentioning

confidence: 88%

“…As demonstrated in [3], the rate of change of parametric amplification with respect to the phase advance is substantial. Therefore, maximum amplification of the response A 2 will require the phase advance s to be calculated and set accurately.…”

Section: Parametric Amplification Of the Secondary Modementioning

confidence: 97%

“…A dc voltage bias V dc of 30 V is applied to the ring structure to enable capacitive detection. A brief overview of the linear model of parametric will be presented since a detailed description is available in [3,13].…”

Section: Parametric Excitation and Amplificationmentioning

confidence: 99%

“…An approximate expression for the equation of motion of the primary mode can be obtained by including only the excitation terms which make a first order contribution to the response at frequency ω f . The linearized equation of motion of the primary mode under combined harmonic forcing and parametric excitation is derived in detail in [3,13] and has the form…”

Section: Parametric Amplification Of the Primary Modementioning

confidence: 99%

See 2 more Smart Citations