An experimental research of love wave sensor based on LiTaO<inf>3</inf>/SiO<inf>2</inf> structure

Abstract

Temperature characteristics of SiO 2 -coated Love Wave oscillators are presented from 10 o C to 60 o C. Surface skimming bulk wave (SSBW) and Love Wave delay line devices were fabricated on the 36 o YX-LiTaO 3 substrate. Near zero TCF of SiO 2 -coated Love Wave oscillators from 10 o C to 60 o C are demonstrated in the 150MHz range. In the gas sensor experiment on dimethylmethylphosphonate (DMMP) detection, the fabricated SXFA-coated chemical sensor exhibited a threshold detection limit and high sensitivity.