2011
DOI: 10.1007/s00170-011-3302-x
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An experimental investigation into the micro-electrodischarge machining behavior of p-type silicon

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Cited by 20 publications
(8 citation statements)
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“…Micro EDM differs from traditional EDM as micro EDM has a comparatively lower discharge energy level, smaller electrodes, and lower axis resolution. Micro EDM is now capable of machining complex 3D micro-features in a wide range of materials, from non-conductive [ 96 ] to semi-conductive materials [ 97 ], with high aspect ratios, such as micro-holes, micro-electrodes or shafts, micro-molds, etc., irrespective of the hardness of the workpiece. In recent years, the EDM process has also found application at nano scale for various applications such as nano-pores for DNA detection devices and nano-holes for next generation fuel injection nozzles [ 98 ].…”
Section: Non-conventional Machining Of Bmgmentioning
confidence: 99%
“…Micro EDM differs from traditional EDM as micro EDM has a comparatively lower discharge energy level, smaller electrodes, and lower axis resolution. Micro EDM is now capable of machining complex 3D micro-features in a wide range of materials, from non-conductive [ 96 ] to semi-conductive materials [ 97 ], with high aspect ratios, such as micro-holes, micro-electrodes or shafts, micro-molds, etc., irrespective of the hardness of the workpiece. In recent years, the EDM process has also found application at nano scale for various applications such as nano-pores for DNA detection devices and nano-holes for next generation fuel injection nozzles [ 98 ].…”
Section: Non-conventional Machining Of Bmgmentioning
confidence: 99%
“…Muhammad et al did a study on graphite nano size powder added in sinking and milling micro-EDM of WC-Co [14]. Operating tank and powder mixed with dielectric circulation were designed.…”
Section: Opened Pm-edm Systemmentioning
confidence: 99%
“…These techniques are generally used for the manufacturing of, for example, micropillars and microgrooves. [30][31][32][33] Electric discharge machining (EDM) was utilized to manufacture tungsten micropillars with a minimum diameter of 7 μm and an aspect ratio of 14 as well as microgrooves with a width of 142 μm in a 500 μm-thick tungsten plate. [34,35] Tungsten carbide was machined using EDM to manufacture micropillars with a minimum diameter of 3 μm and microholes with diameters of 60 μm in a 300 μm-thick tungsten carbide strip.…”
Section: Introductionmentioning
confidence: 99%