An Experimental and Theoretical Investigation of a Micromirror Under Mixed-Frequency Excitation

Ilyas, Saad; Ramini, Abdallah; Arevalo, Arpys; Younis, Mohammad I.

doi:10.1109/jmems.2014.2386285

Cited by 32 publications

(25 citation statements)

References 38 publications

(41 reference statements)

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“…We notice that for every new mixedfrequency, two combination resonances are activated [26][27][28]. As the number of mixed frequencies is increased, the bandwidth increases.…”

Section: Resultsmentioning

confidence: 84%

“…To achieve mixing and to realize an amplified response at certain band of frequency, we exploit the quadratic electrostatic force and excite the H resonator with two or more excitation sources. This triggers the so-called combination resonances [26][27][28]. In the case of two AC harmonic sources in addition to the DC load, the electrostatic excitation load can be expanded as   …”

Section: Resultsmentioning

confidence: 99%

“…By exploiting the dynamic response of this coupled structure, maximum signal amplification (mechanical transformation) is achieved. Furthermore, we excite the structure using mixed-frequency electrostatic forcing [26][27][28] to achieve a wide relatively flat and amplified pass-band filtering and simultaneous mixing characteristics using a single resonator body. Fig.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A Coupled Resonator for Highly Tunable and Amplified Mixer/Filter

Ilyas

Jaber

Younis

2017

IEEE Trans. Electron Devices

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“…We notice that for every new mixedfrequency, two combination resonances are activated [26][27][28]. As the number of mixed frequencies is increased, the bandwidth increases.…”

Section: Resultsmentioning

confidence: 84%

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A Coupled Resonator for Highly Tunable and Amplified Mixer/Filter

Ilyas

Jaber

Younis

2017

IEEE Trans. Electron Devices

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“…There has been increasing interest in obtaining resonant sensors with large-frequency bands, especially with a highquality factor range and near higher order modes of vibrations, where a high sensitivity of detection is demanded 1,2 . A few of the approaches that have been investigated to improve the vibration of resonators and increase their frequency band width are through parametric excitation 16 , secondary resonance 20 , slightly buckled resonators 21 , and multifrequency excitation 22 . Challa et al 23 designed and tested a device with tunable resonant frequency for energy harvesting applications.…”

Section: Introductionmentioning

confidence: 99%

“…The mixed frequency excitation of a micromirror has been studied extensively in Ref. 22, where it is proposed as a method to improve the bandwidth in resonators. Erbe et al 26 demonstrated using the nonlinear response of a strongly driven nanoelectromechanical system resonator as a mechanical mixer in the radiofrequency regime.…”

Section: Introductionmentioning

confidence: 99%

Multifrequency excitation of a clamped–clamped microbeam: Analytical and experimental investigation

2016

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Using partial electrodes and a multifrequency electrical source, we present a large-bandwidth, large-amplitude clamped-clamped microbeam resonator excited near the higher order modes of vibration. We analytically and experimentally investigate the nonlinear dynamics of the microbeam under a two-source harmonic excitation. The first-frequency source is swept around the first three modes of vibration, whereas the second source frequency remains fixed. New additive and subtractive resonances are demonstrated. We illustrated that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled. The microbeam is fabricated using polyimide as a structural layer coated with nickel from the top and chromium and gold layers from the bottom. Using the Galerkin method, a reduced order model is derived to simulate the static and dynamic response of the device. A good agreement between the theoretical and experimental data are reported.

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Theoretical study of an electrostatically actuated torsional microsensor for biological applications

Bouchaala

2017

Microsyst Technol

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MEMS mass sensors can operate in different regimes. The static method is the classical technique to measure physical quantities, and it is based on measuring the static deflection of the microstructure upon mass binding (Schmid et al. 2010;Wu et al. 2001). The dynamic method is considered as the most sensitive technique for mass sensing (Park et al. 2011; Bouchaala et al. 2016a, b, c;Gupta et al. 2004). The fundamental principle of the dynamic MEMS mass sensor is to excite the microstructure near one of its natural frequencies, which is a function of the structure stiffness and mass. By adding a small mass on the top of the resonator, the natural frequency downshifts. Based on analytical and experimental techniques, the sensitivity of the MEMS resonator can be calculated, and hence the frequency shift can be transformed into a measurable mass quantity.Different investigations have been conducted to measure the sensitivity of MEMS mass sensors. Ilic et al. (2001) fabricated nanoelectromechanical oscillators for mass sensing applications. An analytical model is developed to investigate the effect of the added mass on the nano-cantilever beam. Subattogram sensitivity is demonstrated under vacuum conditions. Burg et al. (2006) designed and fabricated an electrostatically actuated biomolecular mass sensor. The transducer is a vacuum packaged suspended microchannel for mass sensing in liquid. Schmid et al. ( 2010) developed a real-time approach for mass and position determination by using a resonant micro string. It consists of measuring the frequency shift of the first two bending modes. Electrostatically actuated torsional microsensor is a very promising structure for mass sensing due to the ability to be actuated from one side and exposed for sensing in the other side. In

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An Experimental and Theoretical Investigation of a Micromirror Under Mixed-Frequency Excitation

Cited by 32 publications

References 38 publications

A Coupled Resonator for Highly Tunable and Amplified Mixer/Filter

A Coupled Resonator for Highly Tunable and Amplified Mixer/Filter

Multifrequency excitation of a clamped–clamped microbeam: Analytical and experimental investigation

Theoretical study of an electrostatically actuated torsional microsensor for biological applications

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