An Electrostatically Actuated Low-Leakage Silicon Microvalve

Sihler, Joachim; Slocum, Alex; Lang, J

doi:10.31438/trf.hh2004.74

Cited by 4 publications

(1 citation statement)

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“…Furthermore, the response time was 1 s. Much higher flow rate was reported in a thermopneumatic microvalve developed by Henning et al [11][12][13], in which a flow rate of over 1 slpm was obtained for a pressure drop of 15.8 psig. The switching time in these valves was also 1 s. Sihler et al [14] reported an electrostatically actuated silicon microvalve for µGC application that had a pressure drop of 8 psi with an open flow rate of only 8.4 sccm of N 2 . A more general review on current microvalve technology may be found in Oh and Chong [15].…”

Section: Introductionmentioning

confidence: 99%

A bistable electromagnetically actuated rotary gate microvalve

Luharuka

Hesketh

2008

J. Micromech. Microeng.

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Two types of rotary gate microvalves are developed for flow modulation in microfluidic systems. These microvalves have been tested for an open flow rate of up to 100 sccm and operate under a differential pressure of 6 psig with flow modulation of up to 100. The microvalve consists of a suspended gate that rotates in the plane of the chip to regulate flow through the orifice. The gate is suspended by a novel fully compliant in-plane rotary bistable micromechanism (IPRBM) that advantageously constrains the gate in all degrees of freedom except for in-plane rotational motion. Multiple inlet/outlet orifices provide flexibility of operating the microvalve in three different flow configurations. The rotary gate microvalve is switched with an external electromagnetic actuator. The suspended gate is made of a soft magnetic material and its electromagnetic actuation is based on the operating principle of a variable-reluctance stepper motor.

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Section: Introductionmentioning

confidence: 99%

A bistable electromagnetically actuated rotary gate microvalve

Luharuka

Hesketh

2008

J. Micromech. Microeng.

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Am electrostatically latching thermopneumatic microvalve with closed-loop position sensing

Potkay

Wise

18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005.

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A low-power pressure-and temperature-programmed separation system for a micro gas chromatograph.

Sacks

Robinson

Lambertus

et al. 2006

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This thesis presents the theory, design, fabrication and testing of the microvalves and columns necessary in a pressure-and temperature-programmed micro gas chromatograph (μGC). Two microcolumn designs are investigated: a bonded Si-glass column having a rectangular cross section and a vapor-deposited silicon oxynitride (Sion) column having a roughly circular cross section. Both microcolumns contain integrated heaters and sensors for rapid, controlled heating. The 3.2 cm x 3.2 cm, 3 m-long siliconglass column, coated with a non-polar polydimethylsiloxane (PDMS) stationary phase, separates 30 volatile organic compounds (VOCs) in less than 6 min. This is the most efficient micromachined column reported to date, producing greater than 4000 plates/m. The 2.7 mm x 1.4 mm Sion column eliminates the glass sealing plate and silicon substrate using deposited dielectrics and is the lowest power and fastest GC column reported to date; it requires only 11 mW to raise the column temperature by 100 ºC and has a response time of 11s and natural temperature ramp rate of 580 ºC/min. A 1 m-long PDMS-coated Sion microcolumn separates 10 VOCs in 52s. A system-based design approach was used for both columns. The 7.5 mm x 10.3 mm integrated microvalve enables low-power pressure programming of the dual-column ensemble and is the first microvalve to utilize a hybrid actuation mechanism consisting of a thermopneumatic drive with an electrostatic hold. The valve has an open flow rate of 8 sccm at 4.6 torr, a leak rate of 1.3x10-3 sccm at 860 torr, a closed-to-open fluidic resistance ratio greater than one million, an actuation time

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An Electrostatically Actuated Low-Leakage Silicon Microvalve

Cited by 4 publications

References 0 publications

A bistable electromagnetically actuated rotary gate microvalve

A bistable electromagnetically actuated rotary gate microvalve

Am electrostatically latching thermopneumatic microvalve with closed-loop position sensing

A low-power pressure-and temperature-programmed separation system for a micro gas chromatograph.

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