An electrostatic microactuator system for application in high-speed jets

Huang, C. C.; Christophorou, Chris; Najafi, K.; Naguib, Ahmed; Nagib, Hassan

doi:10.1109/jmems.2002.1007401

Cited by 21 publications

(11 citation statements)

References 18 publications

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“…Microelectromechanical (MEMS) actuators [ 7 , 8 , 9 , 10 , 11 ] can potentially address these problems, because they can be manufactured more easily, and are more reliable and fast-acting than the piezoelectric ones. Electrostatic actuators have the most potential among them.…”

Section: Introductionmentioning

confidence: 99%

Fast-Response Electrostatic Actuator Based on Nano-Gap

Kostsov

Sokolov

2017

Micromachines

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The possibility of constructing new high-performance electrostatic fast actuators based on energy transformation in nanometer gaps is considered. The construction and the properties of the operation of such devices as well as their typical parameters are described. The drives are based on ferroelectrics with high values of dielectric permittivity (above 1000). They can be constructed using microelectronic technology. It is demonstrated that the actuators are capable of maintaining forces with a specific density up to 106 N/m2 and up to 100–1000 N in real devices for 10–100 µs. Experimental research results of such actuators are presented.

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Section: Introductionmentioning

confidence: 99%

Fast-Response Electrostatic Actuator Based on Nano-Gap

Kostsov

Sokolov

2017

Micromachines

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“…They can also be used to measure forces of microactuators (1) and become the pivot of MEMS to connect to other components. (2)(3)(4) There are two types of microspring often used: (5) one is called the box microspring and the other is called the zigzag (serpentine) microspring. (6) Under the same conditions, the former has a larger spring constant k than the latter.…”

Section: Introductionmentioning

confidence: 99%

Effect of Box Microspring Sizes on Nonlinear Deformation

2009

Sensors and Materials

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Microsprings are often used in micro-electro-mechanical system (MEMS) actuators to transmit force and to restore its original position by its spring force after a movement. Owing to its high stiffness and good capability of resisting lateral forces, the box microspring has the advantages of resisting induced transverse forces and preventing lateral deformation over other microsprings. For better operation, the nonlinear behavior of the microspring should be avoided when the spring is used in MEMS devices. Microspring size can significantly affect microspring performance. In this paper, we report on the effect of box microspring size on the nonlinear deformation of the microspring. The width (W) of the vertical beam of rectangular frames, microspring thickness (T), the width (B) of the horizontal beam of rectangular frames, and the spring number (N) of the box microspring are used as parameters to investigate the effect of box microspring size on nonlinear force. The finite element software COMSOL Multiphysics is used as the simulation tool. From the simulation results, the linear spring constant k and cubic spring constant k 3 are determined and expressed in terms of T, B, W, and N by the regression analytical method. The simulation results of this work can be used to design a microspring in an actuator such that nonlinear deformation is avoided.

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“…Microstructures have been fabricated, such as the microsensors, the micro-actuators, the micropumps and micromotors. [1][2][3][4][5] Now it is found that the microfriction plays more and more important roles in the performance of microstructure.…”

Section: Introductionmentioning

confidence: 99%

Microfriction analysis of novel two-dimensional electrostatic comb device

Zhao¹,

Chen²,

Shen³

2008

Tribology - Materials, Surfaces & Interfaces

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Constructed by a two-dimensional micro-electrostatic comb actuator fabricated by bulk micromachined process, a novel test device on chip was designed to study the phenomena of the microfrictions in the side wall between movable micro-electromechanical system elements. The general analytic expressions of the applied voltages, displacement, the static friction coefficient and the geometry parameters were established. It was found that the displacement was linear to U y 2 , so the friction coefficient could be obtained by fitting them. And larger n b and l 2 could help to decrease U y and to increase the displacement.

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An electrostatic microactuator system for application in high-speed jets

Cited by 21 publications

References 18 publications

Fast-Response Electrostatic Actuator Based on Nano-Gap

Fast-Response Electrostatic Actuator Based on Nano-Gap

Effect of Box Microspring Sizes on Nonlinear Deformation

Microfriction analysis of novel two-dimensional electrostatic comb device

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