2020
DOI: 10.1109/jsen.2020.2992371
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An Electro-Thermally Actuated Micro-Cantilever-Based Fiber Optic Scanner

Abstract: A sub-millimeter sized optical scanner driven by electro-thermal actuation is presented. The scanner is composed of a single-mode optical fiber (SMF) with a cantilevered section at its distal tip. The fiber cantilever is electrothermally actuated near its base in a single direction and excited at resonance to obtain large deflections at the tip of the fiber. Two-dimensional imaging of an object is demonstrated by simultaneously rotating the object while scanning across its diameter. Illumination light from the… Show more

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Cited by 15 publications
(17 citation statements)
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“…In this design, shown in Figure 15 a, an electrothermal chevron actuator made with two parallel legs excites an SMF at resonance. In this case, the total thermal expansion of the actuating material provides a base excitation motion to the cantilevered fiber [ 127 ]. A resolution target image captured with this scanner is provided in Figure 15 b.…”
Section: Actuators In Cantilever-based Endoscopic Devicesmentioning
confidence: 99%
“…In this design, shown in Figure 15 a, an electrothermal chevron actuator made with two parallel legs excites an SMF at resonance. In this case, the total thermal expansion of the actuating material provides a base excitation motion to the cantilevered fiber [ 127 ]. A resolution target image captured with this scanner is provided in Figure 15 b.…”
Section: Actuators In Cantilever-based Endoscopic Devicesmentioning
confidence: 99%
“…The electrothermal actuator is made from a single piece of laser-cut thin brass foil, and the bridge is manually lifted to 90°, perpendicular to the brass foil base [57]. The fiber cantilever was also modified by etching the distal 2 mm of an SMF to reduce its diameter from 125 µm to 12 µm [58]. The fiber cantilever was then attached to the top of the bridge.…”
Section: ) Other Scanning Pattern Systemmentioning
confidence: 99%
“…A laser beam incoming from the optical fiber is scanned laterally to cover the 2-D imaging area as in Figure 11b. A large number of these probes use piezoelectric [16,55,63,64], electromagnetic [65][66][67], electrothermal [6,68,69], shape memory alloy [70], or electroactive ionic polymer [71] actuators to excite an SMF acting as a cantilever beam in the desired scan pattern.…”
Section: Forward View Imagingmentioning
confidence: 99%
“…Kaur et al used a propeller scanning pattern to get a 2-D scan pattern using a single direction actuation of a cantilevered fiber. The fast-axis scan is obtained by using an electrothermal actuator, while the slow-axis scan is performed by rotating the target sample [6].…”
Section: Propeller Scanningmentioning
confidence: 99%
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