1984
DOI: 10.1063/1.333220
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An electrically triggered 200 kV rail-gap switch for wide aperture excimer lasers

Abstract: A wide aperture (7X7 cm 2 ), high output energy (5 J in KrF and 13.8 J in XeCl), UV preionized excimer laser is described. A self-breakdown rail gap was employed as an output switch with the maximum voltage and current up to 230 kV and 300 kA, respectively. To solve the switchingjitter problem associated with the self-breakdown, an electrical triggering was investigated. The measured minimum switching time delay and gap closing time were 40 and 10 ns, respectively. The number of channels up to 50 was observed … Show more

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Cited by 12 publications
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