2015
DOI: 10.1007/s00340-015-6037-9
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An electrically and optically cooperated QEPAS device for highly integrated gas sensors

Abstract: A QEPAS device is demonstrated where the quartz tuning fork (QTF) is not only excited by a laser-induced acoustic wave but also driven electrically by a CMOS circuit at the same time. The gas absorption is measured as the sum of the optically and electrically generated QTF amplitudes. For this design, no accurate and expensive frequency generators are needed since the QTF acts as a photo-acoustic transducer and frequency reference at the same time. Furthermore, simultaneous or alternate electrical and photo-ac… Show more

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Cited by 43 publications
(26 citation statements)
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“…However, for the microphone-based PAS, the low value of Q factor (<100) and the large size of the photoacoustic cell limit its performance and In the QEPAS technique, a quartz tuning fork (QTF) is used as an acoustic wave transducer. The QTF is a commercially available millimeter-sized piezoelectric element, which is usually used in watches, clocks, and electronic circuits to provide clock rate [10][11][12]. The high Q-factor (~100,000 in a vacuum and~10,000 in a standard atmosphere pressure) and narrow resonance frequency band (<1 Hz) of QTF improve the QEPAS selectivity and immunity to environmental acoustic noise [13][14][15][16][17][18][19].…”
Section: Introductionmentioning
confidence: 99%
“…However, for the microphone-based PAS, the low value of Q factor (<100) and the large size of the photoacoustic cell limit its performance and In the QEPAS technique, a quartz tuning fork (QTF) is used as an acoustic wave transducer. The QTF is a commercially available millimeter-sized piezoelectric element, which is usually used in watches, clocks, and electronic circuits to provide clock rate [10][11][12]. The high Q-factor (~100,000 in a vacuum and~10,000 in a standard atmosphere pressure) and narrow resonance frequency band (<1 Hz) of QTF improve the QEPAS selectivity and immunity to environmental acoustic noise [13][14][15][16][17][18][19].…”
Section: Introductionmentioning
confidence: 99%
“…In this paper however, we report on the ability of a continuous phase modulation instead of a fixed setting which yields a steady measurement and additionally separates the photo-acoustically induced amplitude from the offset generated by the oscillator circuit. In [9,10] we already described the ability to incorporate a quartz micro-tuning fork with removed container in an oscillator circuit and to simultaneously focus a laser beam between the tuning fork's prongs to generate acoustic waves upon absorption of the molecule. Since the laser modulation signal is derived from the oscillation circuit that automatically adjusts to the current resonance frequency of the tuning fork, the laser is always modulated with the correct frequency.…”
Section: Methodsmentioning
confidence: 99%
“…This feature differs from other laser absorption spectroscopy such as TDLAS. Diode lasers are usually used in QEPAS based sensing systems due to their compactness and low cost [12][13][14]. However the output power of diode lasers is in the range of several milliwatts which limits the QEPAS detection performance.…”
Section: Introductionmentioning
confidence: 99%