Abstract:<p> This study proposes a new approach to periodic multilayer mirrors (PMMs) characterizations based on measured X-ray reflectivity (XRR) data. Here, XRR data are used to reconstruct the internal structure of PMMs using grazing incidence X-ray reflectivity (GIXR). A mathematical model of electromagnetic wave reflection by PMMs is employed to implement forward prediction, which will then be used iteratively in a global optimization framework in order to reconstruct the PMM unknown structure parameters. A … Show more
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