An efficient earth magnetic field MEMS sensor: Modelling and experimental results

Bagherinia, Mehrdad; Corigliano, Alberto; Mariani, Stefano; Horsley, David A.; Li, Mo; Lasalandra, E.

doi:10.1109/memsys.2014.6765737

Cited by 4 publications

(9 citation statements)

References 8 publications

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“…To compute the bounds, we assume that the in-plane lattice orientation of each grain is a fluctuating field with a uniform statistical distribution. The integral over Ω in Equations (6) and 7can, therefore, be transformed into an integral over such random orientation. The resulting overall behavior of the polysilicon film turns out to be in-plane isotropic, with bounds on the Young's modulus E given by:…”

Section: Analytical Deterministic Homogenizationmentioning

confidence: 99%

“…To design and predict the performance of these micro-devices, accurate models are required to account for the interaction among various physical fields, primarily the thermal, electric, magnetic, and mechanical ones. Numerical and analytical methods have been recently proposed to understand the underlying working principles, and increase the capability to match experimental evidences [4][5][6][7].…”

Section: Introductionmentioning

confidence: 99%

“…Indeed, sensitivity is not the only performance index to account for in the design, since power consumption is of paramount importance for mobile applications. In this regard, a so-called balanced optimization scheme was proposed in [6,7] to allow also for bandwidth and resolution of a capacitive, single-axis Lorentz force magnetometer similar to that here considered, see also [23][24][25].…”

Section: Introductionmentioning

confidence: 99%

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Stochastic Effects on the Dynamics of the Resonant Structure of a Lorentz Force MEMS Magnetometer

Bagherinia

Mariani

2019

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Resonance features of slender mechanical parts of Lorentz force MEMS magnetometers are affected by the (weakly) coupled thermo-electro-magneto-mechanical multi-physics governing their dynamics. We recently showed that reduced-order models for such parts can be written in the form of the Duffing equation, whose nonlinear term stems from the mechanical constraint on the vibrations and is affected by the driving voltage. As some device performance indices vary proportionally to the amplitude of oscillations at resonance, an optimization of the operational conditions may lead to extremely slender, imperfection-sensitive movable structures. In this work, we investigate the effects of imperfections on the mechanical response of a single-axis magnetometer. At the microscopic length-scale, imperfections are given in terms of uncertainties in the values of the over-etch depth and of the Young’s modulus of the vibrating polycrystalline silicon film. Their effects on the nonlinear structural dynamics are investigated through a Monte Carlo analysis, to show how the output of real devices can be scattered around the reference response trend.

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Section: Analytical Deterministic Homogenizationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Stochastic Effects on the Dynamics of the Resonant Structure of a Lorentz Force MEMS Magnetometer

Bagherinia

Mariani

2019

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“…power consumption, bandwidth, and resolution, see [3]. Such effects are here disregarded to get specific insights into the effects on the sensitivity of so-called micro-scale imperfections, as measured by the scattering of the beam width and of the Young's modulus of the polysilicon film constituting the movable structure.…”

Section: Stochastic Analysis: Sensitivity To Imperfectionsmentioning

confidence: 99%

“…To design and predict the performance of this kind of devices, it is required to accurately model the interaction of various physical fields like the mechanical, thermal, electric and magnetic ones. In recent years, different numerical and analytical methods were proposed to better understand the underlying working principles, and increase the ability to capture the experimental evidence [1][2][3].…”

Section: Introductionmentioning

confidence: 99%

Stochastic Effects on the Dynamics of a Resonant MEMS Magnetometer: A Monte Carlo Investigation

Bagherinia

Mariani

Corigliano

2014

Proceedings of International Electronic Conference on Sensors and Applications

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Abstract:In the design of Lorentz force MEMS magnetometers, the coupled thermoelectro-magneto-mechanical fields governing the dynamics of the relevant compliant structures can be appropriately exploited to enhance their performances. In recent works, we showed that reduced-order models for the dynamics of the said movable structures can be recast in the form of the Duffing equation, where nonlinear terms arise from the multiphysics governing the problem. As stochastic effects may play a role due to the micrometric dimensions of the device, an investigation of the link between the statistics of sensor imperfections and output is here carried out. The said imperfections at the microscopic length-scale are modeled in terms of: overetch thickness, assumed to feature a uniform distribution in a proper interval matching available experimental data; and elastic properties of the vibrating polycrystalline silicon film, as obtained through a numerical homogenization procedure over a representative film volume. To get insights into the effects of the parameters governing the nonlinear dynamics of the resonant structure, a Monte Carlo analysis is adopted.

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Extended Bandwidth Lorentz Force Magnetometer Based on Quadrature Frequency Modulation

Sonmezoglu

Horsley

2015

J. Microelectromech. Syst.

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An efficient earth magnetic field MEMS sensor: Modelling and experimental results

Cited by 4 publications

References 8 publications

Stochastic Effects on the Dynamics of the Resonant Structure of a Lorentz Force MEMS Magnetometer

Stochastic Effects on the Dynamics of the Resonant Structure of a Lorentz Force MEMS Magnetometer

Stochastic Effects on the Dynamics of a Resonant MEMS Magnetometer: A Monte Carlo Investigation

Extended Bandwidth Lorentz Force Magnetometer Based on Quadrature Frequency Modulation

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