An effective self-test method for extracting thermal parameters of thermopile IR sensors

Yuan, Tianhui; Fu, Jianyu; Lu, Yihong; Hou, Ying; Huang, Peng; Chen, Dapeng

doi:10.1016/j.measurement.2022.110967

Cited by 4 publications

(7 citation statements)

References 24 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Figure 16b depicts the top view and cross-section of a thermopile IR sensor. 88 Its measurement results are examined and contrasted with those of the device, and the validity of its structure is confirmed by these results, which are compatible with one another. 92 Researchers offer a numerical model for the effective design for optimization of a unique infrared (IR) detector array, which is built on a single silicon-on-insulator (SOI)-based microelectromechanical system (MEMS) membrane.…”

Section: Representative Image Sensing Devices and Their Actual Applic...mentioning

confidence: 59%

“…Along with a thermopile sensor, several on-chip test structures are created. Figure b depicts the top view and cross-section of a thermopile IR sensor . Its measurement results are examined and contrasted with those of the device, and the validity of its structure is confirmed by these results, which are compatible with one another …”

Section: Representative Image Sensing Devices and Their Actual Applic...mentioning

confidence: 59%

“…These thermopile applications are numerous and widely used in body-temperature screening, especially as the 2019-nCoV widespread disease spreads globally beginning in 2020. Figure a shows a schematic view of a thermopile IR sensor . They provide noncontact detection, mobility, simplicity of use, and low cost, wherein sensitivity is a vital characteristic to describe the performance of thermopiles among all other variables …”

Section: Representative Image Sensing Devices and Their Actual Applic...mentioning

confidence: 99%

Section: Representative Image Sensing Devices and Their Actual Applic...mentioning

confidence: 99%

“…Figure 16a shows a schematic view of a thermopile IR sensor. 88 They provide noncontact detection, mobility, simplicity of use, and low cost, wherein sensitivity is a vital characteristic to describe the performance of thermopiles among all other variables. 89 It is effective to quickly test a subject's respiratory rate before they enter a space in order to evaluate potential dangers in their direction and control the spread of COVID-19.…”

Section: Representative Image Sensing Devices and Their Actual Applic...mentioning

confidence: 99%

See 4 more Smart Citations

Technological Evolution of Image Sensing Designed by Nanostructured Materials

Iqbal

Malik

et al. 2023

ACS Materials Lett.

View full text Add to dashboard Cite

Imaging sensing holds a remarkable place in modern electronics and optoelectronics for the complementary metal-oxide-semiconductor integration of highspeed optical communications and photodetection with the merits of high-speed operation, cost-effectiveness, and noncomplex fabrication. The optimum quality of image sensing relies on noise, sensitivity, power consumption, voltage operation, and speed imaging to access and compete with the state-of-the-art image sensing devices in the industry. Many studies have been conducted to address these issues; however, performance has not yet been optimized and solutions are still in the works. In this review, we briefly provide information on recent advances in image sensing using nanostructured emerging materials through nanofabrication integration including the technology evolution on traditional and modern technology platforms, general mechanisms, classification, and actual applications as well as existing limitations. Finally, new challenges and perspectives for the future trends of image sensing and their possible solutions are also discussed.

show abstract

Section: Representative Image Sensing Devices and Their Actual Applic...mentioning

confidence: 59%

Section: Representative Image Sensing Devices and Their Actual Applic...mentioning

confidence: 59%

Section: Representative Image Sensing Devices and Their Actual Applic...mentioning

confidence: 99%

Section: Representative Image Sensing Devices and Their Actual Applic...mentioning

confidence: 99%

Section: Representative Image Sensing Devices and Their Actual Applic...mentioning

confidence: 99%

See 3 more Smart Citations

Technological Evolution of Image Sensing Designed by Nanostructured Materials

Iqbal

Malik

et al. 2023

ACS Materials Lett.

View full text Add to dashboard Cite

show abstract

An in-situ online method for extracting Seebeck coefficient of thermopile infrared sensors across a wide temperature range (300–600 K)

Tang,

Fu,

Chen

et al. 2024

Measurement

View full text Add to dashboard Cite

Wafer acceptance test structures for characterization of thermoelectric materials’ thermal conductivity of thermopile sensors

Fan

Fu²,

Huang³

et al. 2023

J. Micromech. Microeng.

Self Cite

View full text Add to dashboard Cite

Thermopile sensors have a wide range of applications in consumer and industry. Thermopile is the key component of thermopile sensors, and thermal conductivity is a basic thermal parameter of thermopile. Extracting the thermal conductivity of thermoelectric materials in thermopile sensors is of great importance. In this work, wafer acceptable test (WAT) structures that fabricated along with thermopile sensors are presented. They could guarantee the measured materials are identical to those used in thermopile sensors. The test results are consistent with the reported values, and the validity of structures is verified. This method has the advantages of on-line extraction over a wide temperature range, and simultaneous extraction of thermal conductivity of connecting wire.

show abstract

An effective self-test method for extracting thermal parameters of thermopile IR sensors

Cited by 4 publications

References 24 publications

Technological Evolution of Image Sensing Designed by Nanostructured Materials

Technological Evolution of Image Sensing Designed by Nanostructured Materials

An in-situ online method for extracting Seebeck coefficient of thermopile infrared sensors across a wide temperature range (300–600 K)

Wafer acceptance test structures for characterization of thermoelectric materials’ thermal conductivity of thermopile sensors

Contact Info

Product

Resources

About