Abstract:The low yield of ITO thin film deposition is an important factor in semiconductor production. An effective microsystem with economic viability that uses micro electroremoval as a reclaim process was developed to remove the defective ITO nanostructure coatings from the optical PET surfaces of digital paper. By establishing the reclaim process using the ultra-precise removal of the nanostructure coatings, the optoelectronic semiconductor industry can effectively reclaim defective products, minimizing both produc… Show more
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