An atomistic investigation of the impact of in-plane uniaxial stress during solid phase epitaxial regrowth

Abstract

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Atomistic investigation of the impact of stress during solid phase epitaxial regrowth

“…• C. As already discussed in our previous work [12], we observe (i) a reduction of the regrowth velocity upon compressive stress and (ii) no influence of tensile stress on regrowth velocity. This behavior results from the different timescale rates of {100} l and {100} h events.…”

“…In-plane uniaxial stress only impacts {100} atoms with three crystalline neighbors which are a special case of {100} h configurations. In compression, their rate is reduced causing (i) a slowing down of α/c interface until reaching a saturation value for σ 11 ∼ −0.5 GPa and (ii) an increase of α/c interface roughness (not shown here) [5,12,17]. In contrast, upon a tensile stress, the rate of configurations with three crystalline nearest neighbors increases without causing an impact of the macroscopic regrowth velocity because SPER is limited by {100} l events.…”

“…In our previous work (Ref. [12]), we have introduced a fourth order activation strain tensor to take into account the impact of stress on recrystallization frequencies. In this work, we use a second order tensor which is enough to model stress effects on SPER.…”

“…An atomistic SPER model relying on lattice Kinetic Monte Carlo (LKMC) method has been shown to reproduce the different planar SPER velocities and {111} facet formation [10]. It has been recently extended to account for the formation of twins on {111} facets [11] and the influence of in-plane uniaxial stress [12]. In this work, we extend our previous model to account for the impact of an arbitrary stress state.…”

Atomistic modeling of Ge damage accumulation, amorphization and solid phase epitaxial regrowth

“…A simplified model than the one with a four order tensor reported in Sklenard et al (2013), and only using a second order tensor, has proven to be enough to model these SPER stress effects, Sklenard et al (2014). Thus, Eq.…”