An Atomic Simulation of AFM-Based Nano Lithography Process for Nano Patterning

Kim, Y. S.; Choi, Se-Weon; Lee, S. R.; Kim, J.

doi:10.1007/978-1-4020-2111-4_32

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Pacs: 61 72 Hh 64 70 Kg1

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2007

2024

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Cited by 8 publications

(2 citation statements)

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“…The experiment shows that the hardness of silicon is 9.3 GPa [12] and of diamond is 78.96 GPa. [13] One can assume that diamond tip does not deform in the process of cutting the surface. After 5000-MD-step relaxation at temperature of 30 K, a stable structure of workpiece occurs.…”

Section: Pacs: 61 72 Hh 64 70 Kgmentioning

confidence: 99%

In situ observations on the fracture process of metallic glassy ribbons

Wang

Fang

et al. 2008

Scripta Materialia

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Section: Pacs: 61 72 Hh 64 70 Kgmentioning

confidence: 99%

In situ observations on the fracture process of metallic glassy ribbons

Wang

Fang

et al. 2008

Scripta Materialia

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“…[12,13] The time integration of motion is performed by the fifth Gear's predictor-corrector method, [14] time step 𝑑𝑡 = 1.0 fs. The experiment shows that the Ni hardness is about 3.4 GPa and the hardness of diamond is 78.96 GPa; [15] one can assume that the diamond tip does not deform during the process of indentation.…”

mentioning

confidence: 92%

Mechanical Behavior of Nanometer Ni by Simulating Nanoindentation

Tang

Tian-Yong

Liu

2010

Chinese Phys. Lett.

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An indentation simulation of the crystal Ni is carried out by a molecular dynamics technique (MD) to study the mechanical behavior at nanometer scales. Indenter tips with both sphere shape and conical shape with 60 ∘ cone angle are used, and simulation samples with different crystal orientations are adopted. Some defects such as dislocations and point defects are observed. It is found that nucleated defects (dislocations, amorphous atoms) are from the local region near the pin tip or the sample surface. The temperature distribution of the local region is analyzed and it can explain our MD simulation results.

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