Abstract:Mode-localization sensor with amplitude ratio as output metric has shown excellent potential in the field of micro-mass detection. In this paper, an asymmetric mode -localized mass sensor with a pair of electrostatically coupled resonators of different thickness is proposed. Partially distributed electrodes are introduced to ensure the asymmetric mode coupling of second and third order modes while actuating the thinner resonator by the distributed electrode. The analytical dynamic model is established by Eu… Show more
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