“…When PD occurs in SF 6 gas, a portion of SF 6 molecules is decomposed and reacts with H 2 O and O 2 , which are impurities in SF 6 . Many kinds of chemical products are generated, such as SOF 4 , SOF 2 , SO 2 F 2 , SF 4 , SO 2 , CF 4 , CO 2 , HF [9], and so forth.…”