2013
DOI: 10.1016/j.msea.2013.07.054
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An analysis of the elastic properties of a porous aluminium oxide film by means of indentation techniques

Abstract: is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. a b s t r a c tThe elastic modulus of thin films can be directly determined by instrumented indentation when the indenter penetration does not exceed a fraction of the film thickness, depending on the mechanical properties of both film and substrate. When it is not possible, application of models for separating the contribution of the substrate is necessary. I… Show more

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Cited by 16 publications
(9 citation statements)
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References 57 publications
(128 reference statements)
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“…But for the AAO films, the modulus and hardness increase with increasing depth because of the substrate effect. The values of the elastic modulus and hardness obtained for the pure AAO thin film are 35.80 GPa and 1.13 GPa, respectively, and are in good agreement with the values reported in the literature (Vojkuvka et al 2012;Hemmouche et al 2013). The SPE-coated AAO thin film shows similar elastic modulus and hardness values to the non-coated ones, mainly due to the low volume fraction of the polymer, and the fact that the stronger AAO film dominates the mechanical properties of the composite structure; this is confirmed by the FEA results below.…”
Section: Nanoindentationsupporting
confidence: 89%
“…But for the AAO films, the modulus and hardness increase with increasing depth because of the substrate effect. The values of the elastic modulus and hardness obtained for the pure AAO thin film are 35.80 GPa and 1.13 GPa, respectively, and are in good agreement with the values reported in the literature (Vojkuvka et al 2012;Hemmouche et al 2013). The SPE-coated AAO thin film shows similar elastic modulus and hardness values to the non-coated ones, mainly due to the low volume fraction of the polymer, and the fact that the stronger AAO film dominates the mechanical properties of the composite structure; this is confirmed by the FEA results below.…”
Section: Nanoindentationsupporting
confidence: 89%
“…Consequently, a model must be applied for separating the influence of the substrate on the measurement. In the case of porous coating, Hemmouche et al [25] have tested numerous models related to the elastic modulus determination of thin films. They conclude that the model of Gao et al [26] leads to the best prediction and that it has the advantage of being independent of any fitting parameter.…”
Section: Materials and Experimentsmentioning
confidence: 99%
“…Indentation technique (Hardy et al, 1971;Follansbee and Sinclair, 1984;Hill et al, 1989) has been proved very useful in testing mechanical properties of small material samples and, in particular, thin films (Antunes et al, 2007;Hemmouche et al, 2013). By modeling the sample configuration as an elastic layer bonded to a rigid base or to an elastic substrate, one can study the corresponding thickness effect (Hayes et al, 1972; or the substrate effect (Yu et al, 1990;Gao et al, 1992;Chen and Vlassak, 2001;Perriot and Barthel, 2004;Argatov and Sabina, 2014).…”
Section: Introductionmentioning
confidence: 99%