An Alternative Approach to Investigate V-Shaped Electrothermal Microactuators in Vacuum

Gama, Gabriel R. de S.; Coelho, Cláudia; Gaspar, J.; Freitas, Paulo; Sommer, R.L.; Mello, Alexandre

doi:10.1109/jmems.2019.2959717

Cited by 7 publications

(3 citation statements)

References 53 publications

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“…ETAs have many configuration designs for generating bending, linear, torsional, and even 3D actuations for a variety of applications. Commonly adopted basic configurations for ETAs (Figure 8) include cantilever beams (e.g., U-shaped hot-and-cold-arm actuators [134][135][136] and bimorph actuators [137][138][139] ), doubly clamped beams (e.g., straight [140,141] and V-shaped [chevron] beams [134,142,143] ), and drum/balloon-like structures (e.g., inflation actuators [144][145][146] ). The beam is usually a strip, fiber/yarn, spring, or a large film/textile, and the skin of the drum/balloon is an elastic film.…”

Section: Working Principle and Device Configurationmentioning

confidence: 99%

Low‐Voltage Soft Actuators for Interactive Human–Machine Interfaces

Chen

Tan

Gong

et al. 2021

Advanced Intelligent Systems

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Soft electrical actuators driven by low voltages are promising for interactive human-machine interfaces (iHMI) applications including executing orders to complete various tasks and communicating with humans. The attractive features of low-voltage soft electrical actuators include their good safety, low power consumption, small system size, and nonrigid or deformable characteristics. This review covers three typical classes of electrical actuators, namely, electrochemical, electrothermal, and other electrical (dielectric, electrostatic, ferroelectric, and plasticized gel) actuators according to their mechanism and working potential range. For each kind of actuators, the advantages, working principle, device configuration/design, materials selection, recent progress, and potential applications for iHMI are summarized, with the strategies for enhancing the actuation performance under low voltages being highlighted. Finally, the challenges for those soft actuators and possible solutions are discussed.

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Section: Working Principle and Device Configurationmentioning

confidence: 99%

Low‐Voltage Soft Actuators for Interactive Human–Machine Interfaces

Chen

Tan

Gong

et al. 2021

Advanced Intelligent Systems

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“…The motion of electro-thermal (E-T) actuator is usually divided into the out-plane and in-plane motion which exists in the U-shaped [1][2][3], V-shaped [4][5][6] and Z-shaped [4] thermal actuator. Compared with other kinds of actuators such as electrostatic [7], piezoelectric [8] ones, etc, the thermal actuator is more attractive due to its capability of larger driving force and tip displacement [9].…”

Section: Introductionmentioning

confidence: 99%

Double-objective optimization of electro-thermal (E-T) micro-actuator for fiber switch

Chen¹,

Wang²,

Cao³

et al. 2021

J. Micromech. Microeng.

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In this paper, a novel optimization method, in which composed of the genetic algorithm, particle swarm optimization (GA–PSO) and improved gradient descent algorithm, are used to conduct a double-objective optimization for the U-shaped actuator. In the procedure of optimization, two objectives, i.e. force and displacement, and four main sizes are utilized. Before, the deep reactive-ion etch (DRIE) technology is applied to the fabrication of the U-shaped actuator. When different voltages are applied on the actuator, the displacement obtained from numerical calculation always shows a good agreement with that from experiment by edge detection algorithm. Similar phenomenon can be also seen when an external force supplied by the nanoindentation system FemtoTools in the experiment is loaded on the actuator. Based on the validated simulation model of the U-shaped actuator, the improved gradient descent method ensures its displacement very close to 50 µm (target displacement) while the GA–PSO algorithm is used to maximize the output force. In this procedure, the hybrid optimization method implemented by Matlab is incorporated into ANSYS simulation. Preliminary analysis shows that the displacement and force of the particles in each iteration concentrate together with the iteration growing. Fine convergence, whose velocity only depends on the number of particle in the algorithm, is also found in each optimization. Furthermore, the optimized actuators have homologous value of the size variables. At 15 V voltage, the displacement and largest output force of the U-shaped actuator are 2 mN and 50.1 µm, respectively. Finally, an actuator with 30% improvement of the output force is obtained when the displacement condition is meet. According to the optimization result and further parametric scanning simulation analysis, the design range and fabrication error of the sizes of the U-shaped actuator are obtained.

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“…Other heating modes are also possible, such as convection with a proximity parallel layer [3], using light or directive laser [4, 5], or with the environment temperature [6, 7] (for temperature sensing).The design of actuators in general is more robust and accurate when it relies on accurate models. Several models were proposed for the V shape actuator in the literature using numerical [8][9][10][11] and analytical [12][13][14][15][16][17][18][19][20][21][22][23][24][25][26] approaches. The advantage of the analytical modeling is in the better understanding of the actuator behavior and the influence of the different parameters on its performance.…”

mentioning

confidence: 99%

Task feasibility of V shape electrothermal actuators

2020

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This paper investigates the modeling, design, and task feasibility of V shape electrothermal actuators. In the first part, the force-deflection governing expressions are derived and the actuator performance is analyzed based on these expressions. The influence of the actuator dimensions and properties on its performance is clarified. In the second part, the task feasibility is further investigated. A performance measure is proposed for evaluating the capacity of the actuator to accomplish required tasks depending on the application. This measure is used for finding a feasible configuration and optimized design. A case study is finally presented, showing very good agreement between analytical model and finite element simulations, and demonstrating the robustness of the task feasibility measure.

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An Alternative Approach to Investigate V-Shaped Electrothermal Microactuators in Vacuum

Cited by 7 publications

References 53 publications

Low‐Voltage Soft Actuators for Interactive Human–Machine Interfaces

Low‐Voltage Soft Actuators for Interactive Human–Machine Interfaces

Double-objective optimization of electro-thermal (E-T) micro-actuator for fiber switch

Task feasibility of V shape electrothermal actuators

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