An AlN-on-Si resonant IR sensor array with a large temperature coefficient of frequency

Moosavifar, Milad; Ansari, Azadeh; Rais‐Zadeh, Mina

doi:10.1109/icsens.2016.7808781

Cited by 11 publications

(7 citation statements)

References 11 publications

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“…The AD results indicated three main contributions to noise: white noise for a short integration time, thermal drift for a long integration time, and flicker noise. At 40 °C, the slope approached zero at an integration time of ~10 s, which implies that the flicker noise contribution was 0.009 °C [16]. The MDT was 0.0196 °C for an integration time of ~20 s. The maximum frequency stability was achieved at an integration time of τ = 9-20 s with a corresponding MDT of 0.0196 °C-0.027 °C depending on the operating temperature (Fig.…”

Section: Performance Evaluation: Responsivity (Rv) Hysteresis and Mdtmentioning

confidence: 87%

“…Most of the designs in the literature required complex and expensive readout schemes to detect the output, e.g., laser Doppler vibrometer and mixer circuits [16][17][18][19][20][21][22]. However, our device can be read out by tracking the voltage output directly due to the low parasitic signal of the beam.…”

Section: Performance Evaluation: Responsivity (Rv) Hysteresis and Mdtmentioning

confidence: 99%

“…The first technique increases the TCF of a device using multiple materials with different coefficients of thermal expansion (CTEs). And different approaches have been reported in the literature, such as fabricating a structure composed of different materials [13,14], modifying the doping level in device materials [15], and fabricating the device on a substrate with a considerably different CTE [16]. However, these devices are still suffering a limited TCF value of <140 ppm/°Ϲ.…”

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confidence: 99%

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High-Sensitivity Thermal Sensing Based on a Single Strain-Assisted Resonator

et al. 2022

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Microresonator-based temperature sensors offer stable and high-resolution temperature detection. However, typical temperaturesensing techniques based on resonators suffer from design complexity and low sensitivity. In this study, we present a simple high-sensitivity temperature sensor that comprises a sealed electrostatically actuated clamped-clamped silicon microbeam resonator. The sensor's high sensitivity is attributed to the thermal-strain effects due to the mismatch between the thermal expansion coefficients of the composite materials. And the sensitivity is further enhanced by operating the resonator near the buckling zone via in situ Joule heating. In addition, The sensor operates at a single drive frequency that corresponds to the resonant frequency at the maximum temperature. A change in temperature induces a thermal strain that shifts the resonant frequency, which changes the output voltage. This considerably simplifies the readout system from the typical frequency-tracking method to the proposed amplitude tracking method. The encapsulated sensor achieves a minimum detectable temperature of 0.0196 °Ϲ and an absolute temperature coefficient of frequency of 1757 ppm/°Ϲ. These results demonstrate the great potential of the proposed sensor for efficient resonant thermal sensing with high resolution, enhanced sensitivity and a simplified readout scheme.

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Section: Performance Evaluation: Responsivity (Rv) Hysteresis and Mdtmentioning

confidence: 87%

Section: Performance Evaluation: Responsivity (Rv) Hysteresis and Mdtmentioning

confidence: 99%

mentioning

confidence: 99%

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High-Sensitivity Thermal Sensing Based on a Single Strain-Assisted Resonator

et al. 2022

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“…[27] Resonant sensors have been shown to be effective tools for measuring temperature, thermal infrared radiation, force, stress and strain, pressure, and acceleration. [28][29][30][31][32] We now summarize the development of micromachined resonant sensors fabricated by MEMS/NEMS technologies. [33][34][35] Some review papers have highlighted the importance of MMRs for biological and chemical detection purposes.…”

Section: Introductionmentioning

confidence: 99%

Micromachined Mechanical Resonant Sensors: From Materials, Structural Designs to Applications

Dinh,

Rais‐Zadeh,

Nguyen

et al. 2023

Adv Materials Technologies

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Driving a micro and nanomechanical structure to resonance and observing its resonant motion in the physical world have led to numerous fundamental discoveries in physics, sciences, chemistry, biology, and engineering, as well as device commercialization. Scaling down mechanical structures from micrometric to nanometric size has enabled the utilization of resonant motions to probe material properties and various dynamical phenomena in quantum coherence and squeezing. Recent advances in material sciences and nanofabrication resulted in successful demonstration of ultra‐high frequency operation (GHz range) and ultra‐high quality factor (10 billion) micromachined mechanical resonators (MMRs). The resonant motion of these structures has been utilized as an indispensable tool to weigh biological and chemical species at resolution of atomic mass unit, sense a force as small as zepto‐newton, and to detect numerous other physical parameters. Here, a systematic view on the resonant sensing transduction is provided, underlying physics, and sensing structures realized with micro/nano‐electromechanical systems (MEMS/NEMS) technologies. It is also describe the roles of nanomaterials and structures, nano‐fabrication and rational designs on the resonance frequency and quality factor of MMRs toward high‐performance sensing. This paper discusses the most recent advances in the development of MMRs for material characterization as well as biological, chemical, and physical sensing. Finally, the paper discusses the challenges and perspectives on design, fabrication, and developments of resonant sensors with high quality factor toward quantum sensing, and ultra‐high sensitivity and resolution for classical sensing applications.

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“…Such devices could potentially eliminate the need for active electronics for in-sensor signal processing and seamlessly integrate the sensing and wireless readout in one battery-less package. To this end, piezoelectric RF microelectromechanical systems (MEMS) devices are particularly promising, as they offer compact and uncooled sensors monolithically integrated with acoustic readout devices that can survive on hot planets, as well as other Earth-based systems (e.g., oil, gas, and geothermal) [ 1 , 2 , 3 , 4 ].…”

Section: Introductionmentioning

confidence: 99%

A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air

Eisner

Chapin

et al. 2020

Sensors

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This paper reports the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO3; LN) MEMS resonator array up to 500 °C in air. After a high-temperature burn-in treatment, device quality factor (Q) was enhanced to 508 and the resonance shifted to a lower frequency and remained stable up to 500 °C. During subsequent in situ high-temperature testing, the resonant frequencies of two coupled shear horizontal (SH0) modes in the array were 87.36 MHz and 87.21 MHz at 25 °C and 84.56 MHz and 84.39 MHz at 500 °C, correspondingly, representing a −3% shift in frequency over the temperature range. Upon cooling to room temperature, the resonant frequency returned to 87.36 MHz, demonstrating the recoverability of device performance. The first- and second-order temperature coefficient of frequency (TCF) were found to be −95.27 ppm/°C and 57.5 ppb/°C2 for resonant mode A, and −95.43 ppm/°C and 55.8 ppb/°C2 for resonant mode B, respectively. The temperature-dependent quality factor and electromechanical coupling coefficient (kt2) were extracted and are reported. Device Q decreased to 334 and total kt2 increased to 12.40% after high-temperature exposure. This work supports the use of piezoelectric LN as a material platform for harsh environment radio-frequency (RF) resonant sensors (e.g., temperature and infrared) incorporated with high coupling acoustic readout.

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An AlN-on-Si resonant IR sensor array with a large temperature coefficient of frequency

Cited by 11 publications

References 11 publications

High-Sensitivity Thermal Sensing Based on a Single Strain-Assisted Resonator

High-Sensitivity Thermal Sensing Based on a Single Strain-Assisted Resonator

Micromachined Mechanical Resonant Sensors: From Materials, Structural Designs to Applications

A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air

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