2021
DOI: 10.29026/oea.2021.200094
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An advanced III-V-on-silicon photonic integration platform

Abstract: In many application scenarios, silicon (Si) photonics favors the integration of III-V gain material onto Si substrate to realize the on-chip light source. In addition to the current popular integration approaches of III-V-on-Si wafer bonding or direct heteroepitaxial growth, a newly emerged promising solution of epitaxial regrowth on bonded substrate has attracted a lot of interests. High-quality III-V material realization and successful laser demonstrations show its great potential to be a promising integrati… Show more

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Cited by 23 publications
(12 citation statements)
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“…A promising solution is using monolithic hybrid platforms [ 47 , 48 ], which provide a smaller footprint and better reliability than conventional hybrid integration methods. It is worth noting that both platforms have optical sources with a bandwidth higher than 20 nm [ 48 , 49 ].…”
Section: Discussionmentioning
confidence: 99%
“…A promising solution is using monolithic hybrid platforms [ 47 , 48 ], which provide a smaller footprint and better reliability than conventional hybrid integration methods. It is worth noting that both platforms have optical sources with a bandwidth higher than 20 nm [ 48 , 49 ].…”
Section: Discussionmentioning
confidence: 99%
“…At RT, device output optical power from one facet of 4.2 mW and threshold current density of 813 A cm −2 have been reported. Furthermore, a recent review by Hu et al [101] summarized recent research work on this regrowth on bonded template platform. In 2020, the study by Fujii et al [89] demonstrates a similar integration approach of epitaxial growth on InP-on-insulator substrate.…”
Section: Iii-v Integration On Si Through Direct Growthmentioning
confidence: 99%
“…Furthermore, a recent review by Hu et al. [ 101 ] summarized recent research work on this regrowth on bonded template platform. In 2020, the study by Fujii et al.…”
Section: Iii–v Lasers On Siliconmentioning
confidence: 99%
“…This inherits some advantages of direct growth, such as enabling III−V growth and processing on larger silicon substrates, thus reducing costs, while the bonding eliminates egregious sources of defects such as lattice mismatch and crystal structure mismatch. 5 Additionally, the postbond regrowth technique has advantages over the full-stack-bonding heterogeneous integration method with increased flexibility for dense and interspersed integration. Multiple epitaxial structures for different photonic integrated circuit devices may be integrated through separate regrowths by masking off specific sections of the wafer.…”
Section: Introductionmentioning
confidence: 99%
“…The approach explored here is a hybrid of these two methods that involves first bonding a thin high-quality III–V template layer onto silicon and then growing the laser structure on top. This inherits some advantages of direct growth, such as enabling III–V growth and processing on larger silicon substrates, thus reducing costs, while the bonding eliminates egregious sources of defects such as lattice mismatch and crystal structure mismatch . Additionally, the postbond regrowth technique has advantages over the full-stack-bonding heterogeneous integration method with increased flexibility for dense and interspersed integration.…”
Section: Introductionmentioning
confidence: 99%