Abstract:An adaptive recurrent radial basis function network (ARRBFN) tracking controller for a two-dimensional piezo-positioning stage is proposed in this study. First, a mathematical model that represents the dynamics of the two-dimensional piezo-positioning stage is proposed. In this model, a hysteresis friction force that describes the hysteresis behavior of one-dimensional motion is used; and a nonconstant stiffness with the cross-coupling dynamic due to the effect of bending of a lever mechanism in x and y axes a… Show more
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