2008
DOI: 10.1109/tuffc.2008.627
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An adaptive recurrent radial basis function network tracking controller for a two-dimensional piezo-positioning stage

Abstract: An adaptive recurrent radial basis function network (ARRBFN) tracking controller for a two-dimensional piezo-positioning stage is proposed in this study. First, a mathematical model that represents the dynamics of the two-dimensional piezo-positioning stage is proposed. In this model, a hysteresis friction force that describes the hysteresis behavior of one-dimensional motion is used; and a nonconstant stiffness with the cross-coupling dynamic due to the effect of bending of a lever mechanism in x and y axes a… Show more

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Cited by 12 publications
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References 26 publications
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