An Accurate Temperature Regulating Scheme Based on a Resistor With Tailored Nonlinearity for Evaporative Drug Delivery

Abstract

We present the temperature regulation scheme of a resistive silicon heater for evaporative drug delivery to the lungs. The nonlinear specific resistance to temperature behavior of boron doped silicon is used to enable an absolute temperature measurement of the heater without the need of a calibration procedure. Experiments demonstrate that the evaporated mass can be controlled by the heater temperature. The evaporated mass versus heater temperature is linear in the region of useful heater temperatures.