Amplitude-Voltage Response of MEMS Cantilever Resonators Under Soft DC-AC Voltage Near Natural Frequency

Caruntu, Dumitru I.; Taylor, Kyle N.

doi:10.1115/dscc2012-movic2012-8828

Volume 2: Legged Locomotion; Mechatronic Systems; Mechatronics; Mechatronics for Aquatic Environments; MEMS Control; Model Pred 2012

DOI: 10.1115/dscc2012-movic2012-8828

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Amplitude-Voltage Response of MEMS Cantilever Resonators Under Soft DC-AC Voltage Near Natural Frequency

Dumitru I. Caruntu¹,

Kyle N. Taylor²

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Amplitude-Voltage Response of MEMS Cantilever Resonators Under Soft DC-AC Voltage Near Natural Frequency

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