Amplification of DUV solid-state laser pulse using ArF laser

Arakawa, Masaki; Tamaru, Yuki; Fuchimukai, Atsushi; Sasaki, Yōichi; Onose, Takashi; Tamiya, Mitsuru; Miura, Taisuke; Nakazato, Tomoharu; Watanabe, S.; Mutoh, T.

doi:10.1109/cleoe-eqec.2017.8086259

Cited by 3 publications

(1 citation statement)

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“…Narrow band light sources in the deep ultraviolet (DUV) and vacuum ultraviolet (VUV) regions are attractive for photolithography 1) and photoelectron spectroscopy. 2,3) For photolithography, hybrid ArF lasers consisting of a solid state oscillator stage and an ArF amplifier have been developed, achieving an average power of 120 W. 4) Nonlinear crystals, such as KBe 2 BO 3 F 2 (KBBF) 1,5,6) and CsLiB 6 O 10 (CLBO), [7][8][9] were used to generate 193 nm seeds at the oscillator stage. The pulse durations are in the range of 4-5 ns.…”

Section: Introductionmentioning

confidence: 99%

Two-photon absorption of KBe₂BO₃F₂and CsLiB₆O₁₀at 193 nm

Nakazato

Wang

Chen

et al. 2017

Jpn. J. Appl. Phys.

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We measured the two-photon absorption coefficients of KBe2BO3F2 (KBBF) and CsLiB6O10 (CLBO) at 193.5 nm using CaF2 as a reference. This is the first report about KBBF measurement at any wavelength. The two-photon absorption coefficients of KBBF, CLBO, and CaF2 were 1.3 × 10−9, 1.0 × 10−9, and 0.8 × 10−9 cm/W, respectively. We also measured the fluorescence spectra of KBBF, CLBO, and CaF2 excited by 193.5 nm light. The observed spectrum of KBBF had a broad peak at 322 nm, similar to that of CaF2. The luminescence intensity showed a quadratic dependence on incident laser intensity for KBBF and CaF2, indicating a two-photon process, but showed a linear dependence for CLBO. Taken together, we conclude that the two-photon fluorescence of KBBF originates, as in the case of CaF2, from the transition of a self-trapped exciton formed by a F2− ion (self-trapped hole), which captures an electron.

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