Amplification in recombining plasmas (plasma lasers)

Abstract

The initial nucleation and coalescence of Cu by supercritical fluid deposition (SCFD) were monitored by measuring the surface reflectivity of visible white light. The reflectivity at 770 nm is sensitive to initial nucleation, thus, the nucleation and coalescence temperatures of Cu-SCFD can be easily monitored by this in situ technique. The nucleation temperature of Cu-SCFD was found to be independent of the precursor concentration, which suggests a strong adsorption and surface saturation of the source precursor at high concentration. A high H 2 concentration up to 0.39 mol/L with Cu(tmhd) 2 as a precursor can decrease the nucleation temperature from 215 to 180 C. A high H 2 concentration is also effective for realizing a smooth surface morphology of the deposited Cu film and for making the film thin at the coalescence stage probably because of the initial nucleation with a high number density. The fabrication of a 10-nm-thick continuous Cu film, which is required as a seed layer in ultralarge scale integration (ULSI), was successfully demonstrated with a high H 2 concentration of 0.39 mol/L.

The Behaviour of Population in a Plasma Interacting with an Atomic Gas

“…The optical escape factors A\j (j ^ 2) for the lines (assuming Doppler profiles for the Lyman series) are calculated simultaneously with (1). (2), and (3) in the manner described in a previous paper [10].…”

“…where the terms of spatial divergence are neglected as in (1). and 2>n%TJ2 denotes the thermal energy, the suffix t. represents a species of the particles; e, i and a indicate electron, ion and atom, respectively.…”

“…Recombining plasmas in which the population inversion is generated have been already recognized by Gudzenko and Shelepin [1] to be promising as a laser-acting medium.…”

Initial Condition and Cooling Time of Recombining Helium Plasma for Stationary VUV Lasing Action

“…The generation of stimulated emission in a recom bining hydrogen plasma was first pointed out by Gudzenko and Shelepin [1,2]. The idea of using a recombining multi Z hydrogenic ion plasma to create a short wavelength laser oscillation was proposed by Bohn [3] and developed in theoretical papers by Ali and Jones, Jones and Ali, Pert, and Suckewer and Fishman [4][5][6][7][8].…”

Stationary inverted Lyman populations and free-free and bound-free emission of lower-energy state hydride ion formed by an exothermic catalytic reaction of atomic hydrogen and certain group I catalysts

“…In plasma physics, the Lyman series line intensities and their ratios are frequently used in the determination of plasma parameters such as hydrogen number densities and other quantities such as particle fluxes or ion recombination processes [1,2]. For the last four decades, scientists from academia and industry have been searching for lasers using hydrogen plasma [3][4][5][6][7]. Developed sources that provide a usefully intense hydrogen plasma are high powered lasers, arcs and high voltage DC and RF discharges, synchrotron devices, inductively coupled plasma generators, and magnetically confined plasmas.…”