2001
DOI: 10.1016/s0169-4332(01)00220-3
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Amorphous TiO2 in LP-OMCVD TiNxOy thin films revealed by XPS

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Cited by 60 publications
(31 citation statements)
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“…XPS analysis is usually used to evaluate the valence state of titanium atoms and the evolution of hydroxyl groups at the TiO 2 surface [17][18][19][20]. Whatever the TiO 2 powders, the Ti 2p XPS spectra confirmed that Ti is in the +4 oxidation state at the surface.…”
Section: Resultsmentioning
confidence: 99%
“…XPS analysis is usually used to evaluate the valence state of titanium atoms and the evolution of hydroxyl groups at the TiO 2 surface [17][18][19][20]. Whatever the TiO 2 powders, the Ti 2p XPS spectra confirmed that Ti is in the +4 oxidation state at the surface.…”
Section: Resultsmentioning
confidence: 99%
“…Many procedures have been carried out for producing titanium oxynitrides in a controlled atmosphere [1][2][3].…”
Section: Introductionmentioning
confidence: 99%
“…Ti 4 þ (458.6 eV) represents Ti-O bonds, which exists as a form of TiO 2 . Ti 3 þ (457.1 eV) is related to the O preferential sputtering of TiO 2 by Ar þ , which leads to the anionic deficiencies [22,23]. Peak percentage of Ti2p deconvoluted components are calculated (as shown in Table 3) based on area of deconvolutions.…”
Section: Xps Analysismentioning
confidence: 99%