“…Even though the mobility of the holes in these deep states will be low because of localization, the probability of these holes recombining with electrons is also low because of localization. In a recent report [2], we showed that the conductivity of phosphorus-doped films generally increased with increasing substrate temperature (T ) up to the S maximum temperature (%350°C) that was investigated. Figure 3-1 shows that the conductivity of boron-doped films also tends to increase with T except for s '…”