Amorphous SiC/Si Heterojunctions Prepared by the Polymer Route

Chu, C.-J.; Ting, S.-J; Mackenzie, John D.

doi:10.1007/978-3-642-84402-7_15

Cited by 5 publications

(2 citation statements)

References 5 publications

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“…Yajima studied the resistivity of polycarbosilane‐derived SiC as a function of pyrolysis temperature and also suggested a possible application to fabricate small‐size igniters. In the late 1980s Mackenzie's group at UCLA reported the electrical characterization of polycarbosilane‐derived SiC thin films, their semiconducting behavior and also demonstrated the possibility of B and P doping and the fabrication of P–N heterojunctions 368–370 . Surprisingly, the study of electrical properties of PDC was neglected for almost one decade, and was undertaken again in Germany only in 1999, with the work at Bosch 371 and in 2000 with the work of Greil's group 372 .…”

Section: Properties Of Pdcsmentioning

confidence: 99%

Polymer‐Derived Ceramics: 40 Years of Research and Innovation in Advanced Ceramics

Colombo

Mera

Riedel

et al. 2010

Journal of the American Ceramic Society

1,525

582

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Preceramic polymers were proposed over 30 years ago as precursors for the fabrication of mainly Si-based advanced ceramics, generally denoted as polymer-derived ceramics (PDCs). The polymer to ceramic transformation process enabled significant technological breakthroughs in ceramic science and technology, such as the development of ceramic fibers, coatings, or ceramics stable at ultrahigh temperatures (up to 20001C) with respect to decomposition, crystallization, phase separation, and creep. In recent years, several important advances have been achieved such as the discovery of a variety of functional properties associated with PDCs. Moreover, novel insights into their structure at the nanoscale level have contributed to the fundamental understanding of the various useful and unique features of PDCs related to their high chemical durability or high creep resistance or semiconducting behavior. From the processing point of view, preceramic polymers have been used as reactive binders to produce technical ceramics, they have been manipulated to allow for the formation of ordered pores in the meso-range, they have been tested for joining advanced ceramic components, and have been processed into bulk or macroporous components. Consequently, possible fields of applications of PDCs have been extended significantly by the recent research and development activities. Several key engineering fields suitable for application of PDCs include high-temperature-resistant materials (energy materials, automotive, aerospace, etc.), hard materials, chemical engineering (catalyst support, food- and biotechnology, etc.), or functional materials in electrical engineering as well as in micro/ nanoelectronics. The science and technological development of PDCs are highly interdisciplinary, at the forefront of micro- and nanoscience and technology, with expertise provided by chemists, physicists, mineralogists, and materials scientists, and engineers. Moreover, several specialized industries have already commercialized components based on PDCs, and the production and availability of the precursors used has dramatically increased over the past few years. In this feature article, we highlight the following scientific issues related to advanced PDCs research: (1) General synthesis procedures to produce silicon-based preceramic polymers. (2) Special microstructural features of PDCs. (3) Unusual materials properties of PDCs, that are related to their unique nanosized microstructure that makes preceramic polymers of great and topical interest to researchers across a wide spectrum of disciplines. (4) Processing strategies to fabricate ceramic components from preceramic polymers. (5) Discussion and presentation of several examples of possible real-life applications that take advantage of the special characteristics of preceramic polymers. Note: In the past, a wide range of specialized international symposia have been devoted to PDCs, in particular organized by the American Ceramic Society, the European Materials Society, and the Materials Research S...

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Section: Properties Of Pdcsmentioning

confidence: 99%

Polymer‐Derived Ceramics: 40 Years of Research and Innovation in Advanced Ceramics

Colombo

Mera

Riedel

et al. 2010

Journal of the American Ceramic Society

1,525

582

View full text Add to dashboard Cite

show abstract

“…Polymer derived ceramics display several functional properties such as photoluminescence, high Li storage capacity and high chemical durability in highly acid/basic media . Among the functional properties, semiconducting behavior of amorphous SiOC and SiCN has been known since their discovery: for example Yajima in 1983 studied the resistivity of Si(O)C derived from polycarbosilane as a function of pyrolysis temperature and suggested a possible application to fabricate micro igniters; Mackenzie at UCLA in the early ‘90s reported the semiconducting behavior of polycarbosilane‐derived SiC thin films demonstrating the possibility of B and P doping and the fabrication of p‐n junctions . Later on Raj's group at UCB developed MEMS and micro‐glow plugs based on semiconducting amorphous SiCN.…”

Section: Introductionmentioning

confidence: 99%

The effect of B‐doping on the electrical conductivity of polymer‐derived Si(B)OC ceramics

et al. 2017

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In this work the room temperature electrical conductivity of Si(B)OC glasses made via polymer pyrolysis at 1200°C and 1400°C (maximum temperature) and having different amount of boron was measured. When B content is increased from zero (pure SiOC glass) up to B/Si=0.5 the electrical conductivity increases in 2 orders of magnitude from 4.09AE0.64910 À5 up to 2.93AE1.91910 À3 with a corresponding decrease in the activation energy from about 1.08 to 0.51 eV. This results shows for the first time that the electrical conductivity of Si-based polymer-derived ceramics can be controlled by the amount of the doping element.The structure of the Si(B)OC glasses has been studied with different techniques including FT-IR, XRD and Raman spectroscopy. The Raman study indicates that B partially substitutes C into the sp 2 C planes of the free carbon phase forming trigonal BC 3 units. Accordingly, the evolution of the electrical properties with the B content has been correlated with the corresponding structural evolution and a hypothesis is presented to rationalize the role of boron on the electrical conductivity of SiOBC glasses. K E Y W O R D Selectrical conductivity, polymer derived ceramics, Raman spectroscopy, SiBOC

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Polymer‐Derived Ceramics: 40 Years of Research and Innovation in Advanced Ceramics

Colombo

Mera

Riedel

et al. 2013

Ceramics Science and Technology

169

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Amorphous SiC/Si Heterojunctions Prepared by the Polymer Route

Cited by 5 publications

References 5 publications

Polymer‐Derived Ceramics: 40 Years of Research and Innovation in Advanced Ceramics

Polymer‐Derived Ceramics: 40 Years of Research and Innovation in Advanced Ceramics

The effect of B‐doping on the electrical conductivity of polymer‐derived Si(B)OC ceramics

Polymer‐Derived Ceramics: 40 Years of Research and Innovation in Advanced Ceramics

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